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Patent Grant
Optical collector for collecting extreme ultraviolet radiation, met...
Patent number
9,513,569
Issue date
Dec 6, 2016
ETH Zurich
Franz Dieterich
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
OPTICAL COLLECTOR COLLECTING EXTREME ULTRAVIOLET RADIATION, METHOD...
Publication number
20130003167
Publication date
Jan 3, 2013
Franz Dieterich
B82 - NANO-TECHNOLOGY