Viren KALSEKAR

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma-enhanced chemical vapor deposition of carbon hard-mask
- Patent number 12,136,549
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Byung Seok Kwon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chamber architecture for higher throughput...
- Patent number 12,062,526
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Viren Kalsekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate pedestal for improved substrate processing
- Patent number 11,984,305
- Issue date May 14, 2024
- Applied Materials, Inc.
- Viren Kalsekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assemblies and components
- Patent number 11,699,602
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compliance components for semiconductor processing system
- Patent number 11,626,303
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Viren Kalsekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate pedestal for improved substrate processing
- Patent number 11,587,773
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Viren Kalsekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF grounding configuration for pedestals
- Patent number 11,569,072
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Satya Thokachichu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of reducing chamber residues
- Patent number 11,560,623
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Liangfa Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermally controlled lid stack components
- Patent number 11,515,176
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Siva Chandrasekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of hardmask
- Patent number 10,923,334
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Satya Thokachichu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK
- Publication number 20250022709
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL CHOKE PLATE
- Publication number 20240186121
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Vellaichamy Nagappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PUMPING LINER AND METHODS OF MANUFACTURE AND USE THEREOF
- Publication number 20230265560
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Badri Narayan Ramamurthi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF GROUNDING CONFIGURATION FOR PEDESTALS
- Publication number 20230170190
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Satya THOKACHICHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF REDUCING CHAMBER RESIDUES
- Publication number 20230151487
- Publication date May 18, 2023
- Applied Materials, Inc.
- Liangfa HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL FOR IMPROVED SUBSTRATE PROCESSING
- Publication number 20230147452
- Publication date May 11, 2023
- Applied Materials, Inc.
- Viren KALSEKAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL CHOKE PLATE
- Publication number 20230069317
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Siva Chandrasekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER ARCHITECTURE FOR HIGHER THROUGHPUT...
- Publication number 20220130649
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Viren Kalsekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE SEMICONDUCTOR PROCESSING CHAMBER FOR IMPROVED SERVICEABILITY
- Publication number 20220093426
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Samuel W. Shannon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PROCESS SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20220020615
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLIES AND COMPONENTS
- Publication number 20220013373
- Publication date Jan 13, 2022
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPLIANCE COMPONENTS FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20210335635
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Viren Kalsekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMALLY CONTROLLED LID STACK COMPONENTS
- Publication number 20210320018
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Siva Chandrasekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM PURGE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20210320017
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS WITH IMPROVED UNIFORMITY
- Publication number 20210066039
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Jian LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK
- Publication number 20210043455
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESOLVING SPONTANEOUS ARCING DURING THICK FILM DEPOSITION OF HIGH T...
- Publication number 20210017645
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Lu XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LID STRUCTURE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20210013069
- Publication date Jan 14, 2021
- Applied Materials, Inc.
- Viren Kalsekar
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PEDESTAL FOR IMPROVED SUBSTRATE PROCESSING
- Publication number 20200373132
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Viren KALSEKAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF REDUCING CHAMBER RESIDUES
- Publication number 20200362457
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Liangfa HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF HARDMASK
- Publication number 20190341227
- Publication date Nov 7, 2019
- Applied Materials, Inc.
- Satya THOKACHICHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF GROUNDING CONFIGURATION FOR PEDESTALS
- Publication number 20190341232
- Publication date Nov 7, 2019
- Applied Materials, Inc.
- Satya THOKACHICHU
- H01 - BASIC ELECTRIC ELEMENTS

Viren KALSEKAR

Person

Patents Grantslast 30 patents

Plasma-enhanced chemical vapor deposition of carbon hard-mask

Semiconductor processing chamber architecture for higher throughput...

Substrate pedestal for improved substrate processing

Substrate support assemblies and components

Compliance components for semiconductor processing system

Substrate pedestal for improved substrate processing

RF grounding configuration for pedestals

Methods of reducing chamber residues

Thermally controlled lid stack components

Selective deposition of hardmask

Patents Applicationslast 30 patents

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK

THERMAL CHOKE PLATE

PUMPING LINER AND METHODS OF MANUFACTURE AND USE THEREOF

RF GROUNDING CONFIGURATION FOR PEDESTALS

METHODS OF REDUCING CHAMBER RESIDUES

SUBSTRATE PEDESTAL FOR IMPROVED SUBSTRATE PROCESSING

THERMAL CHOKE PLATE

SEMICONDUCTOR PROCESSING CHAMBER ARCHITECTURE FOR HIGHER THROUGHPUT...

MOVABLE SEMICONDUCTOR PROCESSING CHAMBER FOR IMPROVED SERVICEABILITY

MULTIPLE PROCESS SEMICONDUCTOR PROCESSING SYSTEM

SUBSTRATE SUPPORT ASSEMBLIES AND COMPONENTS

COMPLIANCE COMPONENTS FOR SEMICONDUCTOR PROCESSING SYSTEM

THERMALLY CONTROLLED LID STACK COMPONENTS

BOTTOM PURGE FOR SEMICONDUCTOR PROCESSING SYSTEM

SEMICONDUCTOR PROCESSING APPARATUS WITH IMPROVED UNIFORMITY

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK

RESOLVING SPONTANEOUS ARCING DURING THICK FILM DEPOSITION OF HIGH T...

MULTI-LID STRUCTURE FOR SEMICONDUCTOR PROCESSING SYSTEM

SUBSTRATE PEDESTAL FOR IMPROVED SUBSTRATE PROCESSING

METHODS OF REDUCING CHAMBER RESIDUES

SELECTIVE DEPOSITION OF HARDMASK

RF GROUNDING CONFIGURATION FOR PEDESTALS