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Virinder Grewal
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Method for etching high-aspect-ratio features
Patent number
6,897,155
Issue date
May 24, 2005
Applied Materials, Inc.
Ajay Kumar
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for etching high-aspect-ratio features
Publication number
20040033697
Publication date
Feb 19, 2004
APPLIED MATERIALS, INC.
Ajay Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming a capacitor using a high K dielectric material
Publication number
20030222296
Publication date
Dec 4, 2003
APPLIED MATERIALS, INC.
Ajay Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Gate etch process for 12 inch wafers
Publication number
20020177323
Publication date
Nov 28, 2002
Virinder Grewal
H01 - BASIC ELECTRIC ELEMENTS