Vishal Gauri

Person

Lyndhurst, OH, US

People

Patents Grantslast 30 patents

Information Patent Grant
CVD flowable gap fill
- Patent number 9,257,302
- Issue date Feb 9, 2016
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flowable film dielectric gap fill process
- Patent number 8,809,161
- Issue date Aug 19, 2014
- Novellus Systems, Inc.
- Vishal Gauri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flowable film dielectric gap fill process
- Patent number 8,481,403
- Issue date Jul 9, 2013
- Novellus Systems, Inc.
- Vishal Gauri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flowable film dielectric gap fill process
- Patent number 7,888,233
- Issue date Feb 15, 2011
- Novellus Systems, Inc.
- Vishal Gauri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flowable film dielectric gap fill process
- Patent number 7,524,735
- Issue date Apr 28, 2009
- Novellus Systems, Inc.
- Vishal Gauri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process modulation to prevent structure erosion during gap fill
- Patent number 7,217,658
- Issue date May 15, 2007
- Novellus Systems, Inc.
- Atiye Bayman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition profile modification through process chemistry
- Patent number 7,122,485
- Issue date Oct 17, 2006
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling etch process repeatability
- Patent number 7,078,312
- Issue date Jul 18, 2006
- Novellus Systems, Inc.
- Siswanto Sutanto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective gap-fill process
- Patent number 7,074,690
- Issue date Jul 11, 2006
- Novellus Systems, Inc.
- Vishal Gauri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gap fill for high aspect ratio structures
- Patent number 7,067,440
- Issue date Jun 27, 2006
- Novellus Systems, Inc.
- Atiye Bayman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step deposition and etch back gap fill process
- Patent number 6,867,086
- Issue date Mar 15, 2005
- Novellus Systems, Inc.
- David Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-density plasma process for filling high aspect ratio structures
- Patent number 6,846,745
- Issue date Jan 25, 2005
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gap fill for high aspect ratio structures
- Patent number 6,787,483
- Issue date Sep 7, 2004
- Novellus Systems, Inc.
- Atiye Bayman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for radiation enhanced supercritical fluid pro...
- Patent number 6,715,498
- Issue date Apr 6, 2004
- Novellus Systems, Inc.
- Raashina Humayun
- B08 - CLEANING
Information Patent Grant
Gap fill for high aspect ratio structures
- Patent number 6,596,654
- Issue date Jul 22, 2003
- Novellus Systems, Inc.
- Atiye Bayman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming green ceramic arc tubes using pres...
- Patent number 6,592,804
- Issue date Jul 15, 2003
- General Electric Company
- Vishal Gauri
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Binder system for ceramic arc discharge lamp
- Patent number 6,592,695
- Issue date Jul 15, 2003
- General Electric Company
- Daniel L. Polis
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Suspension adhesive for bonding and sealing components in a light s...
- Patent number 6,531,209
- Issue date Mar 11, 2003
- General Electric Company
- Daniel Polis
- C03 - GLASS MINERAL OR SLAG WOOL

Patents Applicationslast 30 patents

Information Patent Application
FLOWABLE FILM DIELECTRIC GAP FILL PROCESS
- Publication number 20140017904
- Publication date Jan 16, 2014
- Vishal GAURI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming complex ceramic shapes
- Publication number 20040168470
- Publication date Sep 2, 2004
- Curtis E. Scott
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
Suspension adhesive and method for bonding and sealing components
- Publication number 20020066519
- Publication date Jun 6, 2002
- General Electric Company
- Daniel Polis
- C03 - GLASS MINERAL OR SLAG WOOL

Vishal Gauri

Person

Patents Grantslast 30 patents

CVD flowable gap fill

Flowable film dielectric gap fill process

Flowable film dielectric gap fill process

Flowable film dielectric gap fill process

Flowable film dielectric gap fill process

Process modulation to prevent structure erosion during gap fill

Deposition profile modification through process chemistry

Method for controlling etch process repeatability

Selective gap-fill process

Gap fill for high aspect ratio structures

Multi-step deposition and etch back gap fill process

High-density plasma process for filling high aspect ratio structures

Gap fill for high aspect ratio structures

Method and apparatus for radiation enhanced supercritical fluid pro...

Gap fill for high aspect ratio structures

Method and apparatus for forming green ceramic arc tubes using pres...

Binder system for ceramic arc discharge lamp

Suspension adhesive for bonding and sealing components in a light s...

Patents Applicationslast 30 patents

FLOWABLE FILM DIELECTRIC GAP FILL PROCESS

Method for forming complex ceramic shapes

Suspension adhesive and method for bonding and sealing components