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Vishwanathan Rangarajan

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  • Beaverton, OR, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma activated conformal dielectric film deposition
    • Patent number 10,043,655
    • Issue date Aug 7, 2018
    • Novellus Systems, Inc.
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma activated conformal dielectric film deposition
    • Patent number 9,570,274
    • Issue date Feb 14, 2017
    • Novellus Systems, Inc.
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma activated conformal dielectric film deposition
    • Patent number 8,999,859
    • Issue date Apr 7, 2015
    • Novellus Systems, Inc.
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Hardmask materials
    • Patent number 8,846,525
    • Issue date Sep 30, 2014
    • Novellus Systems, Inc.
    • Vishwanathan Rangarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma activated conformal dielectric film deposition
    • Patent number 8,637,411
    • Issue date Jan 28, 2014
    • Novellus Systems, Inc.
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Hardmask materials
    • Patent number 8,536,073
    • Issue date Sep 17, 2013
    • Novellus Systems, Inc.
    • Vishwanathan Rangarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus including a plasma chamber and controller including instr...
    • Patent number 8,479,683
    • Issue date Jul 9, 2013
    • Novellus Systems, Inc.
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Depositing conformal boron nitride film by CVD without plasma
    • Patent number 8,288,292
    • Issue date Oct 16, 2012
    • Novellus Systems, Inc.
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Hardmask materials
    • Patent number 8,247,332
    • Issue date Aug 21, 2012
    • Novellus Systems, Inc.
    • Vishwanathan Rangarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Remote plasma processing of interface surfaces
    • Patent number 8,217,513
    • Issue date Jul 10, 2012
    • Novellus Systems, Inc.
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Hardmask materials
    • Patent number 8,178,443
    • Issue date May 15, 2012
    • Novellus Systems, Inc.
    • Vishwanathan Rangarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Remote plasma processing of interface surfaces
    • Patent number 8,084,339
    • Issue date Dec 27, 2011
    • Novellus Systems, Inc.
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION
    • Publication number 20170148628
    • Publication date May 25, 2017
    • Novellus Systems, Inc.
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION
    • Publication number 20150206719
    • Publication date Jul 23, 2015
    • Novellus Systems, Inc.
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION
    • Publication number 20140216337
    • Publication date Aug 7, 2014
    • Novellus Systems, Inc.
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HARDMASK MATERIALS
    • Publication number 20130330932
    • Publication date Dec 12, 2013
    • Novellus Systems, Inc.
    • Vishwanathan Rangarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITING CONFORMAL BORON NITRIDE FILMS
    • Publication number 20130008378
    • Publication date Jan 10, 2013
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HARDMASK MATERIALS
    • Publication number 20120276752
    • Publication date Nov 1, 2012
    • Vishwanathan Rangarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION
    • Publication number 20120028454
    • Publication date Feb 2, 2012
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITING CONFORMAL BORON NITRIDE FILMS
    • Publication number 20110244694
    • Publication date Oct 6, 2011
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HARDMASK MATERIALS
    • Publication number 20110135557
    • Publication date Jun 9, 2011
    • Vishwanathan Rangarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HARDMASK MATERIALS
    • Publication number 20110133313
    • Publication date Jun 9, 2011
    • Vishwanathan Rangarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOTE PLASMA PROCESSING OF INTERFACE SURFACES
    • Publication number 20110120377
    • Publication date May 26, 2011
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOTE PLASMA PROCESSING OF INTERFACE SURFACES
    • Publication number 20100317198
    • Publication date Dec 16, 2010
    • Novellus Systems, Inc.
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOTE PLASMA PROCESSING OF INTERFACE SURFACES
    • Publication number 20100317178
    • Publication date Dec 16, 2010
    • Novellus Systems, Inc.
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...