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Viswas Purohit
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Boise, ID, US
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last 30 patents
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Patent Grant
Surface modification control for etch metric enhancement
Patent number
10,446,453
Issue date
Oct 15, 2019
Tokyo Electron Limited
Brian J. Coppa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SURFACE MODIFICATION CONTROL FOR ETCH METRIC ENHANCEMENT
Publication number
20180269119
Publication date
Sep 20, 2018
TOKYO ELECTRON LIMITED
Brian J. Coppa
H01 - BASIC ELECTRIC ELEMENTS