Vitaliy Shklover

Person

Konigsbronn, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming nanostructures on a surface and optical element
- Patent number 11,982,788
- Issue date May 14, 2024
- Carl Zeiss SMT GmbH
- Vitaliy Shklover
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for in-situ dynamic protection of a surface and optical asse...
- Patent number 11,681,236
- Issue date Jun 20, 2023
- Carl Zeiss SMT GmbH
- Vitaliy Shklover
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for in situ protection of an aluminum layer and optical arra...
- Patent number 11,525,946
- Issue date Dec 13, 2022
- Carl Zeiss SMT GmbH
- Vitaliy Shklover
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mirror, in particular for a microlithographic projection exposure s...
- Patent number 11,366,395
- Issue date Jun 21, 2022
- Carl Zeiss SMT GmbH
- Kerstin Hild
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for treating a reflective optical element for the EUV wavele...
- Patent number 11,328,831
- Issue date May 10, 2022
- Carl Zeiss SMT GmbH
- Christian Grasse
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for repairing reflective optical elements for EUV lithography
- Patent number 11,099,484
- Issue date Aug 24, 2021
- Carl Zeiss SMT GmbH
- Robert Meier
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical element, and method for correcting the wavefront effect of...
- Patent number 11,029,515
- Issue date Jun 8, 2021
- Carl Zeiss SMT GmbH
- Kerstin Hild
- G02 - OPTICS
Information Patent Grant
Reflective optical element for EUV lithography
- Patent number 10,649,340
- Issue date May 12, 2020
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical element
- Patent number 10,642,167
- Issue date May 5, 2020
- Carl Zeiss SMT GmbH
- Vitaliy Shklover
- G02 - OPTICS
Information Patent Grant
Optical grating and optical assembly for same
- Patent number 10,578,783
- Issue date Mar 3, 2020
- Carl Zeiss SMT GmbH
- Sebastian Brueck
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical element
- Patent number 9,933,711
- Issue date Apr 3, 2018
- Carl Zeiss SMT GmbH
- Vitaliy Shklover
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflective optical element for grazing incidence in the EUV wavelen...
- Patent number 9,703,209
- Issue date Jul 11, 2017
- Carl Zeiss SMT GmbH
- Vitaliy Shklover
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system and method for shaping a profile of a laser beam
- Patent number 7,944,615
- Issue date May 17, 2011
- Carl Zeiss Laser Optics GmbH
- Vitaliy Shklover
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical devices and related systems and methods
- Patent number 7,629,572
- Issue date Dec 8, 2009
- Carl Zeiss Laser Optics GmbH
- Vitaliy Shklover
- G02 - OPTICS
Information Patent Grant
Systems and methods for generating laser light shaped as a line beam
- Patent number 7,471,455
- Issue date Dec 30, 2008
- Cymer, Inc.
- Palash P. Das
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
LAYER-FORMING METHOD, OPTICAL ELEMENT AND OPTICAL SYSTEM
- Publication number 20230367226
- Publication date Nov 16, 2023
- Carl Zeiss SMT GMBH
- Vitaliy SHKLOVER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL ELEMENT, IN PARTICULAR FOR REFLECTING EUV RADIATION, OPTICA...
- Publication number 20230266673
- Publication date Aug 24, 2023
- Carl Zeiss SMT GMBH
- Vitaliy SHKLOVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...
- Publication number 20230257866
- Publication date Aug 17, 2023
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD FOR PRODUCING REFLECTIVE OPTICAL ELEMENTS FOR THE EUV WAVELE...
- Publication number 20230253129
- Publication date Aug 10, 2023
- Carl Zeiss SMT GMBH
- Vitaliy SHKLOVER
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE A...
- Publication number 20230122333
- Publication date Apr 20, 2023
- Carl Zeiss SMT GMBH
- Kerstin HILD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR IN-SITU DYNAMIC PROTECTION OF A SURFACE AND OPTICAL ASSE...
- Publication number 20210341848
- Publication date Nov 4, 2021
- Carl Zeiss SMT GMBH
- Vitaliy SHKLOVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR IN SITU PROTECTION OF AN ALUMINUM LAYER AND OPTICAL ARRA...
- Publication number 20210293998
- Publication date Sep 23, 2021
- Carl Zeiss SMT GMBH
- Vitaliy SHKLOVER
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR FORMING NANOSTRUCTURES ON A SURFACE AND OPTICAL ELEMENT
- Publication number 20210293996
- Publication date Sep 23, 2021
- Carl Zeiss SMT GMBH
- Vitaliy SHKLOVER
- B82 - NANO-TECHNOLOGY
Information Patent Application
MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE S...
- Publication number 20210055662
- Publication date Feb 25, 2021
- Carl Zeiss SMT GMBH
- Kerstin HILD
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
OPTICAL ELEMENT, AND METHOD FOR CORRECTING THE WAVEFRONT EFFECT OF...
- Publication number 20200393673
- Publication date Dec 17, 2020
- Carl Zeiss SMT GMBH
- Kerstin HILD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR REPAIRING REFLECTIVE OTPICAL ELEMENTS FOR EUV LITHOGRAPHY
- Publication number 20190302628
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Robert MEIER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY
- Publication number 20190171108
- Publication date Jun 6, 2019
- Carl Zeiss SMT GMBH
- Dirk Heinrich EHM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL GRATING AND OPTICAL ASSEMBLY FOR SAME
- Publication number 20190137668
- Publication date May 9, 2019
- Carl Zeiss SMT GMBH
- Sebastian BRUECK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR TREATING A REFLECTIVE OPTICAL ELEMENT FOR THE EUV WAVELE...
- Publication number 20190035512
- Publication date Jan 31, 2019
- Carl Zeiss SMT GMBH
- Christian Grasse
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT
- Publication number 20180196362
- Publication date Jul 12, 2018
- Carl Zeiss SMT GMBH
- Vitaliy Shklover
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR GRAZING INCIDENCE IN THE EUV WAVELEN...
- Publication number 20150009480
- Publication date Jan 8, 2015
- Carl Zeiss Laser Optics GmbH
- Vitaliy Shklover
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT
- Publication number 20140211181
- Publication date Jul 31, 2014
- Vitaliy Shklover
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM AND METHOD FOR SHAPING A PROFILE OF ALASER BEAM
- Publication number 20090244712
- Publication date Oct 1, 2009
- CARL ZEISS LASER OPTICS GmbH
- Vitaliy Shklover
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Optical System and Method for Shaping a Profile of a Laser Beam
- Publication number 20090002833
- Publication date Jan 1, 2009
- Carl Zeiss SMT AG
- Vitaliy Shklover
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Optical devices and related systems and methods
- Publication number 20080272275
- Publication date Nov 6, 2008
- Vitaliy Shklover
- G02 - OPTICS
Information Patent Application
Systems and methods for generating laser light shaped as a line beam
- Publication number 20070097511
- Publication date May 3, 2007
- Cymer, Inc.
- Palash P. Das
- G02 - OPTICS

Vitaliy Shklover

Person

Patents Grantslast 30 patents

Method for forming nanostructures on a surface and optical element

Method for in-situ dynamic protection of a surface and optical asse...

Method for in situ protection of an aluminum layer and optical arra...

Mirror, in particular for a microlithographic projection exposure s...

Method for treating a reflective optical element for the EUV wavele...

Method for repairing reflective optical elements for EUV lithography

Optical element, and method for correcting the wavefront effect of...

Reflective optical element for EUV lithography

Optical element

Optical grating and optical assembly for same

Optical element

Reflective optical element for grazing incidence in the EUV wavelen...

Optical system and method for shaping a profile of a laser beam

Optical devices and related systems and methods

Systems and methods for generating laser light shaped as a line beam

Patents Applicationslast 30 patents

LAYER-FORMING METHOD, OPTICAL ELEMENT AND OPTICAL SYSTEM

OPTICAL ELEMENT, IN PARTICULAR FOR REFLECTING EUV RADIATION, OPTICA...

METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...

METHOD FOR PRODUCING REFLECTIVE OPTICAL ELEMENTS FOR THE EUV WAVELE...

MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE A...

METHOD FOR IN-SITU DYNAMIC PROTECTION OF A SURFACE AND OPTICAL ASSE...

METHOD FOR IN SITU PROTECTION OF AN ALUMINUM LAYER AND OPTICAL ARRA...

METHOD FOR FORMING NANOSTRUCTURES ON A SURFACE AND OPTICAL ELEMENT

MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE S...

OPTICAL ELEMENT, AND METHOD FOR CORRECTING THE WAVEFRONT EFFECT OF...

METHOD FOR REPAIRING REFLECTIVE OTPICAL ELEMENTS FOR EUV LITHOGRAPHY

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY

OPTICAL GRATING AND OPTICAL ASSEMBLY FOR SAME

METHOD FOR TREATING A REFLECTIVE OPTICAL ELEMENT FOR THE EUV WAVELE...

OPTICAL ELEMENT

REFLECTIVE OPTICAL ELEMENT FOR GRAZING INCIDENCE IN THE EUV WAVELEN...

OPTICAL ELEMENT

OPTICAL SYSTEM AND METHOD FOR SHAPING A PROFILE OF ALASER BEAM

Optical System and Method for Shaping a Profile of a Laser Beam

Optical devices and related systems and methods

Systems and methods for generating laser light shaped as a line beam