Vitaly J. Berkman

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Brookline, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Ozone system for multi-chamber tools
- Patent number 8,480,862
- Issue date Jul 9, 2013
- MKS Instruments, Inc.
- Vitaly J. Berkman
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ozone system for multi-chamber tools
- Patent number 7,892,502
- Issue date Feb 22, 2011
- MKS Instruments, Inc.
- Vitaly J. Berkman
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ozone and other reactive gas generator cell and system
- Patent number 5,932,180
- Issue date Aug 3, 1999
- Applied Science & Technology, Inc.
- Xinyu Zhang
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
Ozone Systems for Multi-Chamber Tools
- Publication number 20110108122
- Publication date May 12, 2011
- Vitaly J. Berkman
- G05 - CONTROLLING REGULATING
Information Patent Application
Ozone system for multi-chamber tools
- Publication number 20070020160
- Publication date Jan 25, 2007
- MKS Instruments, Inc.
- Vitaly J. Berkman
- G05 - CONTROLLING REGULATING