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Vito TOMASELLO
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Mountain View, CA, US
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last 30 patents
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Patent Grant
Focus-dose co-optimization based on overlapping process window
Patent number
10,459,345
Issue date
Oct 29, 2019
ASML Netherlands B.V.
Stefan Hunsche
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
FOCUS-DOSE CO-OPTIMIZATION BASED ON OVERLAPPING PROCESS WINDOW
Publication number
20180074413
Publication date
Mar 15, 2018
Stefan HUNSCHE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY