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Vivek Bakshi
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Austin, TX, US
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last 30 patents
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Patent Grant
Systems and methods for in-situ reflectivity degradation monitoring...
Patent number
7,760,341
Issue date
Jul 20, 2010
Sematech, Inc.
Vivek Bakshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods for monitoring and controlling the operation of...
Patent number
7,709,816
Issue date
May 4, 2010
Sematech, Inc.
Vivek Bakshi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV lithography filter
Patent number
7,250,620
Issue date
Jul 31, 2007
Infineon Technologies AG
Stefan Wurm
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
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Patent Application
Systems and Methods for In-Situ Reflectivity Degradation Monitoring...
Publication number
20090059196
Publication date
Mar 5, 2009
Vivek Bakshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Systems and Methods for Monitoring and Controlling the Operation of...
Publication number
20090046273
Publication date
Feb 19, 2009
Vivek Bakshi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV lithography filter
Publication number
20060160031
Publication date
Jul 20, 2006
Stefan Wurm
G02 - OPTICS