Vivek Bharat SHAH

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology slot plates
- Patent number 12,057,333
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Kenneth Brian Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chucking process and system for substrate processing chambers
- Patent number 12,020,911
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Bhaskar Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques to improve adhesion and defects for tungsten carbide film
- Patent number 11,859,275
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Vivek Bharat Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration sensor for precursor delivery system
- Patent number 11,808,746
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Vivek B. Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma parameters and skew characterization by high speed imaging
- Patent number 11,545,376
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Sidharth Bhatia
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Graded dimple height pattern on heater for lower backside damage an...
- Patent number 11,515,191
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Vivek B. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma density control on substrate edge
- Patent number 11,495,440
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Bhaskar Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chucking process and system for substrate processing chambers
- Patent number 11,488,811
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Bhaskar Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for removing contaminant particles in a plasm...
- Patent number 11,120,976
- Issue date Sep 14, 2021
- Applied Materials, Inc.
- Bhaskar Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote capacitively coupled plasma source with improved ion blocker
- Patent number 11,069,514
- Issue date Jul 20, 2021
- Applied Materials, Inc.
- Vivek B Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique to prevent aluminum fluoride build up on the heater
- Patent number 10,892,143
- Issue date Jan 12, 2021
- Applied Materials, Inc.
- Vivek Bharat Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma density control on substrate edge
- Patent number 10,790,121
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Bhaskar Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma parameters and skew characterization by high speed imaging
- Patent number 10,748,797
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Sidharth Bhatia
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and methods for removing contaminant particles in a plasm...
- Patent number 10,714,319
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Bhaskar Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aluminum fluoride mitigation by plasma treatment
- Patent number 10,688,538
- Issue date Jun 23, 2020
- Applied Materials, Inc.
- Vivek Bharat Shah
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATION QUALITY MONITORING USING MULTI-CHANNEL SENSOR DATA
- Publication number 20240371617
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Jeremy Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONCENTRATION SENSOR FOR PRECURSOR DELIVERY SYSTEM
- Publication number 20240019410
- Publication date Jan 18, 2024
- Vivek B. Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT CHARACTERIZATION TO BUILD A DIGITAL TWIN
- Publication number 20230195060
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Vivek Bharat Shah
- G05 - CONTROLLING REGULATING
Information Patent Application
MANUFACTURING EQUIPMENT PARTS QUALITY MANAGEMENT SYSTEM
- Publication number 20230195061
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Milind Jayram Gadre
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND MECHANISMS FOR COUPLING SENSORS TO TRANSFER CHAMBER ROBOT
- Publication number 20230089982
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Phillip Criminale
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY SLOT PLATES
- Publication number 20230076170
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Kenneth Brian Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCKING PROCESS AND SYSTEM FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230048661
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Bhaskar KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND MECHANISM FOR CONTACT-FREE PROCESS CHAMBER CHARACTERIZATION
- Publication number 20230008072
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Vivek B. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONCENTRATION SENSOR FOR PRECURSOR DELIVERY SYSTEM
- Publication number 20230003704
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- Vivek B. Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Remote Capacitively Coupled Plasma Source with Improved Ion Blocker
- Publication number 20210351020
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Vivek B. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES TO IMPROVE ADHESION AND DEFECTS FOR TUNGSTEN CARBIDE FILM
- Publication number 20210108309
- Publication date Apr 15, 2021
- Applied Materials, Inc.
- Vivek Bharat SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA DENSITY CONTROL ON SUBSTRATE EDGE
- Publication number 20200381222
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Bhaskar KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PARAMETERS AND SKEW CHARACTERIZATION BY HIGH SPEED IMAGING
- Publication number 20200357668
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Sidharth BHATIA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR REMOVING CONTAMINANT PARTICLES IN A PLASM...
- Publication number 20200350146
- Publication date Nov 5, 2020
- Applied Materials, Inc.
- Bhaskar KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCKING PROCESS AND SYSTEM FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20200286716
- Publication date Sep 10, 2020
- Applied Materials, Inc.
- Bhaskar KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRADED DIMPLE HEIGHT PATTERN ON HEATER FOR LOWER BACKSIDE DAMAGE AN...
- Publication number 20200135530
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- Vivek B. Shah
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Remote Capacitively Coupled Plasma Source With Improved Ion Blocker
- Publication number 20200035467
- Publication date Jan 30, 2020
- Applied Materials, Inc.
- Vivek B. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE TO ENABLE HIGH TEMPERATURE CLEAN FOR RAPID PROCESSING OF...
- Publication number 20190382889
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Venkata Sharat Chandra PARIMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR REMOVING CONTAMINANT PARTICLES IN A PLASM...
- Publication number 20190259585
- Publication date Aug 22, 2019
- Applied Materials, Inc.
- Bhaskar KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DENSITY CONTROL ON SUBSTRATE EDGE
- Publication number 20180294146
- Publication date Oct 11, 2018
- Applied Materials, Inc.
- Bhaskar KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PHASE PARTICLE REDUCTION IN PECVD CHAMBER
- Publication number 20180294139
- Publication date Oct 11, 2018
- Applied Materials, Inc.
- Bhaskar KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PARAMETERS AND SKEW CHARACTERIZATION BY HIGH SPEED IMAGING
- Publication number 20180204750
- Publication date Jul 19, 2018
- Applied Materials, Inc.
- Sidharth BHATIA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TECHNIQUE TO PREVENT ALUMINUM FLUORIDE BUILD UP ON THE HEATER
- Publication number 20180114679
- Publication date Apr 26, 2018
- Applied Materials, Inc.
- Vivek Bharat SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM FLUORIDE MITIGATION BY PLASMA TREATMENT
- Publication number 20180036775
- Publication date Feb 8, 2018
- Applied Materials, Inc.
- Vivek Bharat SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Vivek Bharat SHAH

Person

Patents Grantslast 30 patents

Metrology slot plates

Chucking process and system for substrate processing chambers

Techniques to improve adhesion and defects for tungsten carbide film

Concentration sensor for precursor delivery system

Plasma parameters and skew characterization by high speed imaging

Graded dimple height pattern on heater for lower backside damage an...

Plasma density control on substrate edge

Chucking process and system for substrate processing chambers

Apparatus and methods for removing contaminant particles in a plasm...

Remote capacitively coupled plasma source with improved ion blocker

Technique to prevent aluminum fluoride build up on the heater

Plasma density control on substrate edge

Plasma parameters and skew characterization by high speed imaging

Apparatus and methods for removing contaminant particles in a plasm...

Aluminum fluoride mitigation by plasma treatment

Patents Applicationslast 30 patents

PLASMA GENERATION QUALITY MONITORING USING MULTI-CHANNEL SENSOR DATA

CONCENTRATION SENSOR FOR PRECURSOR DELIVERY SYSTEM

SUBSTRATE SUPPORT CHARACTERIZATION TO BUILD A DIGITAL TWIN

MANUFACTURING EQUIPMENT PARTS QUALITY MANAGEMENT SYSTEM

METHODS AND MECHANISMS FOR COUPLING SENSORS TO TRANSFER CHAMBER ROBOT

METROLOGY SLOT PLATES

CHUCKING PROCESS AND SYSTEM FOR SUBSTRATE PROCESSING CHAMBERS

METHOD AND MECHANISM FOR CONTACT-FREE PROCESS CHAMBER CHARACTERIZATION

CONCENTRATION SENSOR FOR PRECURSOR DELIVERY SYSTEM

Remote Capacitively Coupled Plasma Source with Improved Ion Blocker

TECHNIQUES TO IMPROVE ADHESION AND DEFECTS FOR TUNGSTEN CARBIDE FILM

PLASMA DENSITY CONTROL ON SUBSTRATE EDGE

PLASMA PARAMETERS AND SKEW CHARACTERIZATION BY HIGH SPEED IMAGING

APPARATUS AND METHODS FOR REMOVING CONTAMINANT PARTICLES IN A PLASM...

CHUCKING PROCESS AND SYSTEM FOR SUBSTRATE PROCESSING CHAMBERS

GRADED DIMPLE HEIGHT PATTERN ON HEATER FOR LOWER BACKSIDE DAMAGE AN...

Remote Capacitively Coupled Plasma Source With Improved Ion Blocker

TECHNIQUE TO ENABLE HIGH TEMPERATURE CLEAN FOR RAPID PROCESSING OF...

APPARATUS AND METHODS FOR REMOVING CONTAMINANT PARTICLES IN A PLASM...

PLASMA DENSITY CONTROL ON SUBSTRATE EDGE

GAS PHASE PARTICLE REDUCTION IN PECVD CHAMBER

PLASMA PARAMETERS AND SKEW CHARACTERIZATION BY HIGH SPEED IMAGING

TECHNIQUE TO PREVENT ALUMINUM FLUORIDE BUILD UP ON THE HEATER

ALUMINUM FLUORIDE MITIGATION BY PLASMA TREATMENT