Vivek Upadhaya

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Hwaseong, KR

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Patents Applicationslast 30 patents

Information Patent Application
GAS INJECTION SYSTEM AND A WAFER PROCESSING APPARATUS USING THE SAME
- Publication number 20250019828
- Publication date Jan 16, 2025
- ASM IP HOLDING B.V.
- Vivek Upadhaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME
- Publication number 20240392439
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- SungHoon Jun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...