Vladimir Galburt

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing head with local wafer pressure
- Patent number 11,986,923
- Issue date May 21, 2024
- Applied Materials, Inc.
- Andrew Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing carrier head with multiple angular pressurizable zones
- Patent number 11,780,049
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Processing system architecture with single load lock chamber
- Patent number 9,337,014
- Issue date May 10, 2016
- Alta Devices, Inc.
- Vladimir Galburt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electroprocessing profile control
- Patent number 7,709,382
- Issue date May 4, 2010
- Applied Materials, Inc.
- Antoine P. Manens
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electroprocessing profile control
- Patent number 7,655,565
- Issue date Feb 2, 2010
- Applied Materials, Inc.
- Antoine P. Manens
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for determining scrubber brush pressure
- Patent number 7,507,296
- Issue date Mar 24, 2009
- Applied Materials, Inc.
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for determining scrubber brush pressure
- Patent number 7,229,504
- Issue date Jun 12, 2007
- Applied Materials, Inc.
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for determining scrubber brush pressure
- Patent number 6,986,185
- Issue date Jan 17, 2006
- Applied Materials Inc.
- Michael N. Sugarman
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING HEAD WITH LOCAL WAFER PRESSURE
- Publication number 20240253179
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Andrew NAGENGAST
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING CARRIER HEAD WITH MULTIPLE ZONES
- Publication number 20230405758
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES
- Publication number 20210402558
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES
- Publication number 20210402549
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
ELECTROPROCESSING PROFILE CONTROL
- Publication number 20080047841
- Publication date Feb 28, 2008
- Antoine P. Manens
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROPROCESSING PROFILE CONTROL
- Publication number 20080045012
- Publication date Feb 21, 2008
- Antoine P. Manens
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR DETERMINING SCRUBBER BRUSH PRESSURE
- Publication number 20070221249
- Publication date Sep 27, 2007
- APPLIED MATERIALS, INC.
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Application
Electroprocessing profile control
- Publication number 20060166500
- Publication date Jul 27, 2006
- APPLIED MATERIALS, INC.
- Antoine P. Manens
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods and apparatus for determining scrubber brush pressure
- Publication number 20060090774
- Publication date May 4, 2006
- APPLIED MATERIALS, INC.
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Application
Endpoint for electrochemical processing
- Publication number 20050077188
- Publication date Apr 14, 2005
- APPLIED MATERIALS, INC.
- Daxin Mao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods and apparatus for determining scrubber brush pressure
- Publication number 20030111095
- Publication date Jun 19, 2003
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Application
Wafer presence sensor for detecting quartz wafers
- Publication number 20020117188
- Publication date Aug 29, 2002
- Vladimir Galburt
- G01 - MEASURING TESTING

Vladimir Galburt

Person

Patents Grantslast 30 patents

Polishing head with local wafer pressure

Polishing carrier head with multiple angular pressurizable zones

Processing system architecture with single load lock chamber

Electroprocessing profile control

Electroprocessing profile control

Methods and apparatus for determining scrubber brush pressure

Methods and apparatus for determining scrubber brush pressure

Methods and apparatus for determining scrubber brush pressure

Patents Applicationslast 30 patents

POLISHING HEAD WITH LOCAL WAFER PRESSURE

POLISHING CARRIER HEAD WITH MULTIPLE ZONES

POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES

POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES

ELECTROPROCESSING PROFILE CONTROL

ELECTROPROCESSING PROFILE CONTROL

METHODS AND APPARATUS FOR DETERMINING SCRUBBER BRUSH PRESSURE

Electroprocessing profile control

Methods and apparatus for determining scrubber brush pressure

Endpoint for electrochemical processing

Methods and apparatus for determining scrubber brush pressure

Wafer presence sensor for detecting quartz wafers