Vladimir Kruglyakov

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Haemek, IL

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Patents Grantslast 30 patents

Information Patent Grant
Critical dimension variation correction in extreme ultraviolet lith...
- Patent number 10,670,955
- Issue date Jun 2, 2020
- Carl Zeiss SMT GmbH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension variation correction in extreme ultraviolet lith...
- Patent number 10,095,101
- Issue date Oct 9, 2018
- Carl Zeiss SMT GmbH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface defect repair by irradiation
- Patent number 9,690,191
- Issue date Jun 27, 2017
- Carl Zeiss SMS Ltd
- Sergey Oshemkov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Controllable transmission and phase compensation of transparent mat...
- Patent number 9,034,539
- Issue date May 19, 2015
- Carl Zeiss SMS GmbH
- Sergey Oshemkov
- C03 - GLASS MINERAL OR SLAG WOOL

Patents Applicationslast 30 patents

Information Patent Application
CRITICAL DIMENSION VARIATION CORRECTION IN EXTREME ULTRAVIOLET LITH...
- Publication number 20190004417
- Publication date Jan 3, 2019
- Carl Zeiss SMT GMBH
- Sergey OSHEMKOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CRITICAL DIMENSION VARIATION CORRECTION IN EXTREME ULTRAVIOLET LITH...
- Publication number 20160370697
- Publication date Dec 22, 2016
- Carl Zeiss SMT GMBH
- Sergey OSHEMKOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROLLABLE TRANSMISSION AND PHASE COMPENSATION OF TRANSPARENT MAT...
- Publication number 20130209926
- Publication date Aug 15, 2013
- Sergey Oshemkov
- C03 - GLASS MINERAL OR SLAG WOOL