Vladimir Mikhailovich Krivtsun

Person

Moscow, RU

People

Patents Grantslast 30 patents

Information Patent Grant
High-brightness laser produced plasma source and method of generati...
- Patent number 12,028,958
- Issue date Jul 2, 2024
- Isteq B.V.
- Samir Ellwi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser-pumped light source and method for laser ignition of plasma
- Patent number 11,875,986
- Issue date Jan 16, 2024
- Isteq B.V.
- Dmitriy Borisovich Abramenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray source with rotating liquid-metal target
- Patent number 11,869,742
- Issue date Jan 9, 2024
- Isteq B.V.
- Aleksandr Yurievich Vinokhodov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broadband laser-pumped plasma light source
- Patent number 11,503,696
- Issue date Nov 15, 2022
- RnD-ISAN, Ltd
- Dmitriy Borisovich Abramenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Short-wavelength radiation source with multisectional collector mod...
- Patent number 11,252,810
- Issue date Feb 15, 2022
- Isteq B.V.
- Vladimir Vitalievich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High-brightness laser-pumped plasma light source
- Patent number 11,191,147
- Issue date Nov 30, 2021
- RnD-ISAN, Ltd
- Dmitriy Borisovich Abramenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser-pumped plasma light source and method for light generation
- Patent number 10,964,523
- Issue date Mar 30, 2021
- RnD-ISAN, Ltd
- Robert Rafilevich Gayasov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High brightness laser-produced plasma light source
- Patent number 10,887,973
- Issue date Jan 5, 2021
- Isteq B.V.
- Vladimir Vitalievich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser-pumped plasma light source and plasma ignition method
- Patent number 10,770,282
- Issue date Sep 8, 2020
- RnD-ISAN, Ltd
- Dmitry Borisovich Abramenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact wideband VUV spectrometer
- Patent number 10,753,798
- Issue date Aug 25, 2020
- RnD-ISAN, Ltd
- Dmitriy Borisovich Abramenko
- G01 - MEASURING TESTING
Information Patent Grant
High-brightness laser produced plasma source and methods for genera...
- Patent number 10,638,588
- Issue date Apr 28, 2020
- Isteq B.V.
- Aleksandr Yurievich Vinokhodov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High brightness short-wavelength radiation source (variants)
- Patent number 10,588,210
- Issue date Mar 10, 2020
- Isteq B.V.
- Aleksandr Yurievich Vinokhodov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High-brightness LPP EUV light source
- Patent number 9,476,841
- Issue date Oct 25, 2016
- OOO “Isteq B.V.”
- Pavel Stanislavovich Antsiferov
- G01 - MEASURING TESTING
Information Patent Grant
Source-collector device, lithographic apparatus, and device manufac...
- Patent number 9,411,238
- Issue date Aug 9, 2016
- ASML Netherlands B.V.
- Andrei Mikhailovich Yakunin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation system and lithographic apparatus
- Patent number 9,411,250
- Issue date Aug 9, 2016
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source
- Patent number 9,366,967
- Issue date Jun 14, 2016
- ASML Netherlands B.V.
- Andrei Mikhailovich Yakunin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source with laser pumping and method for generating radiation
- Patent number 9,368,337
- Issue date Jun 14, 2016
- OOO “RnD-ISAN”
- Pavel Stanislavovich Antsiferov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photon source, metrology apparatus, lithographic system and device...
- Patent number 9,357,626
- Issue date May 31, 2016
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source with laser pumping and method for generating radiation
- Patent number 9,357,627
- Issue date May 31, 2016
- OOO “RnD-ISAN”
- Pavel Stanislavovich Antsiferov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus
- Patent number 9,307,624
- Issue date Apr 5, 2016
- ASML Netherlands B.V.
- Denis Alexandrovich Glushkov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic patterning process and resists to use therein
- Patent number 9,261,784
- Issue date Feb 16, 2016
- ASML Netherlands B.V.
- Sander Frederik Wuister
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Spectral purity filter
- Patent number 9,007,565
- Issue date Apr 14, 2015
- ASML Netherlands B.V.
- Andrei Mikhailovich Yakunin
- G02 - OPTICS
Information Patent Grant
Photon source, metrology apparatus, lithographic system and device...
- Patent number 8,921,814
- Issue date Dec 30, 2014
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source and lithographic apparatus
- Patent number 8,755,032
- Issue date Jun 17, 2014
- ASML Netherlands B.V.
- Andrei Mikhailovich Yakunin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ex-situ removal of deposition on an optical element
- Patent number 8,598,550
- Issue date Dec 3, 2013
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,493,548
- Issue date Jul 23, 2013
- ASML Netherlands B.V.
- Vladimir Vitalevich Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 8,294,128
- Issue date Oct 23, 2012
- ASML Netherlands B.V.
- Vladimir Mihailovitch Krivtsun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ex-situ removal of deposition on an optical element
- Patent number 8,134,136
- Issue date Mar 13, 2012
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- B08 - CLEANING
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,872,244
- Issue date Jan 18, 2011
- ASML Netherlands B.V.
- Vladimir Vitalevich Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 7,825,390
- Issue date Nov 2, 2010
- ASML Netherlands B.V.
- Vladimir Mihallovitch Krivtsun
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND...
- Publication number 20240121878
- Publication date Apr 11, 2024
- ISTEQ GROUP HOLDING B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER-PUMPED LIGHT SOURCE AND METHOD FOR LASER IGNITION OF PLASMA
- Publication number 20230052481
- Publication date Feb 16, 2023
- RnD-ISAN, Ltd
- Dmitriy Borisovich ABRAMENKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET
- Publication number 20220310351
- Publication date Sep 29, 2022
- EUV LABS, LTD
- Aleksandr Yurievich VINOKHODOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATI...
- Publication number 20220132647
- Publication date Apr 28, 2022
- Isteq B.V.
- Samir ELLWI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BROADBAND LASER-PUMPED PLASMA LIGHT SOURCE
- Publication number 20220053627
- Publication date Feb 17, 2022
- RnD-ISAN, Ltd
- Dmitriy Borisovich ABRAMENKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH-BRIGHTNESS LASER-PUMPED PLASMA LIGHT SOURCE
- Publication number 20210282256
- Publication date Sep 9, 2021
- RnD-ISAN, Ltd
- Dmitriy Borisovich ABRAMENKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHORT-WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MOD...
- Publication number 20210092824
- Publication date Mar 25, 2021
- Isteq B.V.
- Vladimir Vitalievich IVANOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMPACT WIDEBAND VUV SPECTROMETER
- Publication number 20200173853
- Publication date Jun 4, 2020
- RND-ISAN, LTD
- Dmitriy Borisovich ABRAMENKO
- G01 - MEASURING TESTING
Information Patent Application
HIGH BRIGHTNESS LASER-PRODUCED PLASMA LIGHT SOURCE
- Publication number 20200163197
- Publication date May 21, 2020
- Isteq B.V.
- Vladimir Vitalievich IVANOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH BRIGHTNESS SHORT-WAVELENGTH RADIATION SOURCE (VARIANTS)
- Publication number 20200060014
- Publication date Feb 20, 2020
- Isteq B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHODS FOR GENERA...
- Publication number 20190166679
- Publication date May 30, 2019
- Isteq B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION
- Publication number 20160044774
- Publication date Feb 11, 2016
- Pavel Stanislavovich ANTSIFEROV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION
- Publication number 20150311058
- Publication date Oct 29, 2015
- RND-ISAN, LTD
- Pavel Stanislavovich ANTSIFEROV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Photon Source, Metrology Apparatus, Lithographic System and Device...
- Publication number 20150108373
- Publication date Apr 23, 2015
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
SOURCE-COLLECTOR DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFAC...
- Publication number 20140375974
- Publication date Dec 25, 2014
- Andrei Mikhailovich Yakunin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
RADIATION SOURCE
- Publication number 20140368802
- Publication date Dec 18, 2014
- ASML NETHERLANDS B.V.
- Andrei Mikhailovich Yakunin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC PATTERNING PROCESS AND RESISTS TO USE THEREIN
- Publication number 20140212819
- Publication date Jul 31, 2014
- ASML NETHERLANDS B.V.
- Sander Frederik Wuister
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Photon Source, Metrology Apparatus, Lithographic System and Device...
- Publication number 20130329204
- Publication date Dec 12, 2013
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130287968
- Publication date Oct 31, 2013
- ASML Netherland B.V.
- Vladimir Vitalevich Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Application
EUV Radiation Source and EUV Radiation Generation Method
- Publication number 20130015373
- Publication date Jan 17, 2013
- ASML Netherlands B.V.
- Andrei Mikhailovich Yakunin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS AND SPECTRAL PURITY FILTER
- Publication number 20130010275
- Publication date Jan 10, 2013
- ASML NETHERLANDS B.V.
- Viacheslav Medvedev
- B82 - NANO-TECHNOLOGY
Information Patent Application
SPECTRAL PURITY FILTER
- Publication number 20120307224
- Publication date Dec 6, 2012
- ASML NETHERLANDS B.V.
- Andrei Mikhailovich Yakunin
- G02 - OPTICS
Information Patent Application
MULTILAYER MIRROR, LITHOGRAPIC APPARATUS, AND METHODS FOR MANUFACTU...
- Publication number 20120229785
- Publication date Sep 13, 2012
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitch Krivtsun
- G02 - OPTICS
Information Patent Application
EX-SITU REMOVAL OF DEPOSITION ON AN OPTICAL ELEMENT
- Publication number 20120140196
- Publication date Jun 7, 2012
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich BANINE
- B08 - CLEANING
Information Patent Application
RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20110170079
- Publication date Jul 14, 2011
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
- Publication number 20110164236
- Publication date Jul 7, 2011
- ASML Netherlands B.V.
- Andrei Mikhailovich Yakunin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVI...
- Publication number 20110043777
- Publication date Feb 24, 2011
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitc Krivtsun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...
- Publication number 20110037960
- Publication date Feb 17, 2011
- ASML NETHERLANDS B.V.
- Luigi Scaccabarozzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET RADIATION SOURCE AND METHOD FOR PRODUCING EXTRE...
- Publication number 20110020752
- Publication date Jan 27, 2011
- ASML NETHERLANDS B.V.
- Yurii Victorovitch Sidelnikov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS WITH PLASMA RADIATION SOURCE AND METHOD OF FORMING A BEAM...
- Publication number 20110013167
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitch KRIVTSUN
- B82 - NANO-TECHNOLOGY

Vladimir Mikhailovich Krivtsun

Person

Patents Grantslast 30 patents

High-brightness laser produced plasma source and method of generati...

Laser-pumped light source and method for laser ignition of plasma

X-ray source with rotating liquid-metal target

Broadband laser-pumped plasma light source

Short-wavelength radiation source with multisectional collector mod...

High-brightness laser-pumped plasma light source

Laser-pumped plasma light source and method for light generation

High brightness laser-produced plasma light source

Laser-pumped plasma light source and plasma ignition method

Compact wideband VUV spectrometer

High-brightness laser produced plasma source and methods for genera...

High brightness short-wavelength radiation source (variants)

High-brightness LPP EUV light source

Source-collector device, lithographic apparatus, and device manufac...

Radiation system and lithographic apparatus

Radiation source

Light source with laser pumping and method for generating radiation

Photon source, metrology apparatus, lithographic system and device...

Light source with laser pumping and method for generating radiation

Lithographic apparatus

Lithographic patterning process and resists to use therein

Spectral purity filter

Photon source, metrology apparatus, lithographic system and device...

Radiation source and lithographic apparatus

Ex-situ removal of deposition on an optical element

Lithographic apparatus and device manufacturing method

Apparatus with plasma radiation source and method of forming a beam...

Ex-situ removal of deposition on an optical element

Lithographic apparatus and device manufacturing method

Apparatus with plasma radiation source and method of forming a beam...

Patents Applicationslast 30 patents

HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND...

LASER-PUMPED LIGHT SOURCE AND METHOD FOR LASER IGNITION OF PLASMA

X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET

HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATI...

BROADBAND LASER-PUMPED PLASMA LIGHT SOURCE

HIGH-BRIGHTNESS LASER-PUMPED PLASMA LIGHT SOURCE

SHORT-WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MOD...

COMPACT WIDEBAND VUV SPECTROMETER

HIGH BRIGHTNESS LASER-PRODUCED PLASMA LIGHT SOURCE

HIGH BRIGHTNESS SHORT-WAVELENGTH RADIATION SOURCE (VARIANTS)

HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHODS FOR GENERA...

LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION

LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION

Photon Source, Metrology Apparatus, Lithographic System and Device...

SOURCE-COLLECTOR DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFAC...

RADIATION SOURCE

LITHOGRAPHIC PATTERNING PROCESS AND RESISTS TO USE THEREIN

Photon Source, Metrology Apparatus, Lithographic System and Device...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

EUV Radiation Source and EUV Radiation Generation Method

LITHOGRAPHIC APPARATUS AND SPECTRAL PURITY FILTER

SPECTRAL PURITY FILTER

MULTILAYER MIRROR, LITHOGRAPIC APPARATUS, AND METHODS FOR MANUFACTU...

EX-SITU REMOVAL OF DEPOSITION ON AN OPTICAL ELEMENT

RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS

RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVI...

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...

EXTREME ULTRAVIOLET RADIATION SOURCE AND METHOD FOR PRODUCING EXTRE...

APPARATUS WITH PLASMA RADIATION SOURCE AND METHOD OF FORMING A BEAM...