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Vladimir Nikolaevich Polkovnikov
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Nizhny Novgorod, RU
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last 30 patents
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Patent Grant
Multilayer mirror, method of producing a multilayer mirror and lith...
Patent number
9,448,492
Issue date
Sep 20, 2016
ASML Netherlands B.V.
Andrei Mikhailovich Yakunin
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
MULTILAYER MIRROR, METHOD OF PRODUCING A MULTILAYER MIRROR AND LITH...
Publication number
20140198306
Publication date
Jul 17, 2014
ASML NETHERLANDS B.V.
Andrei Mikhailovich Yakunin
B82 - NANO-TECHNOLOGY