Vladimir Zila

Person

Scarborough, CA

People

Patents Grantslast 30 patents

Information Patent Grant
Modular semiconductor workpiece processing tool
- Patent number 7,074,246
- Issue date Jul 11, 2006
- Semitool, Inc.
- Robert W. Berner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing the surface of a microelectron...
- Patent number 6,869,510
- Issue date Mar 22, 2005
- Semitool, Inc.
- Daniel J. Woodruff
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Apparatus for processing the surface of a microelectronic workpiece
- Patent number 6,699,373
- Issue date Mar 2, 2004
- Semitool, Inc.
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus having lift and tilt mechanism
- Patent number 6,654,122
- Issue date Nov 25, 2003
- Semitool, Inc.
- Kyle Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing the surface of a microelectron...
- Patent number 6,645,356
- Issue date Nov 11, 2003
- Semitool, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Modular semiconductor workpiece processing tool
- Patent number 6,440,178
- Issue date Aug 27, 2002
- Semitool, Inc.
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatus for processing the surface of a microelectron...
- Patent number 6,309,524
- Issue date Oct 30, 2001
- Semitool, Inc.
- Daniel J. Woodruff
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Methods and apparatus for processing the surface of a microelectron...
- Patent number 6,309,520
- Issue date Oct 30, 2001
- Semitool, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatus for processing the surface of a microelectron...
- Patent number 6,303,010
- Issue date Oct 16, 2001
- Semitool, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Modular semiconductor workpiece processing tool
- Patent number 6,203,582
- Issue date Mar 20, 2001
- Semitool, Inc.
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor processing apparatus having lift and tilt mechanism
- Patent number 6,091,498
- Issue date Jul 18, 2000
- Semitool, Inc.
- Kyle Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing head for semiconductor processing machines
- Patent number 5,731,678
- Issue date Mar 24, 1998
- Semitool, Inc.
- Vladimir Zila
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Modular semiconductor workpiece processing tool
- Publication number 20050193537
- Publication date Sep 8, 2005
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for copper plating using electroless plating a...
- Publication number 20050189213
- Publication date Sep 1, 2005
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Semiconductor processing apparatus having lift and tilt mechanism
- Publication number 20040226510
- Publication date Nov 18, 2004
- Semitool. Inc.
- Kyle Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular semiconductor workpiece processing tool
- Publication number 20020194716
- Publication date Dec 26, 2002
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods and apparatus for processing the surface of a microelectron...
- Publication number 20020108851
- Publication date Aug 15, 2002
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods and apparatus for processing the surface of a microelectron...
- Publication number 20020053510
- Publication date May 9, 2002
- Daniel J. Woodruff
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
Semiconductor processing apparatus having lift and tilt mechanism
- Publication number 20020009357
- Publication date Jan 24, 2002
- Kyle Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular semiconductor workpiece processing tool
- Publication number 20010030101
- Publication date Oct 18, 2001
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Vladimir Zila

Person

Patents Grantslast 30 patents

Modular semiconductor workpiece processing tool

Methods and apparatus for processing the surface of a microelectron...

Apparatus for processing the surface of a microelectronic workpiece

Semiconductor processing apparatus having lift and tilt mechanism

Methods and apparatus for processing the surface of a microelectron...

Modular semiconductor workpiece processing tool

Methods and apparatus for processing the surface of a microelectron...

Methods and apparatus for processing the surface of a microelectron...

Methods and apparatus for processing the surface of a microelectron...

Modular semiconductor workpiece processing tool

Semiconductor processing apparatus having lift and tilt mechanism

Processing head for semiconductor processing machines

Patents Applicationslast 30 patents

Modular semiconductor workpiece processing tool

Method and apparatus for copper plating using electroless plating a...

Semiconductor processing apparatus having lift and tilt mechanism

Modular semiconductor workpiece processing tool

Methods and apparatus for processing the surface of a microelectron...

Methods and apparatus for processing the surface of a microelectron...

Semiconductor processing apparatus having lift and tilt mechanism

Modular semiconductor workpiece processing tool