Vladislav Y. Vassiliev

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Method of silicon oxide and silicon glass films deposition
- Patent number 6,583,069
- Issue date Jun 24, 2003
- Chartered Semiconductor Manufacturing Co., Ltd.
- Vladislav Y. Vassiliev
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Method of high-density plasma boron-containing silicate glass film...
- Patent number 6,500,771
- Issue date Dec 31, 2002
- Chartered Semiconductor Manufacturing Ltd.
- Vladislav Vassiliev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-phase additives for an enhancement of lateral etch component du...
- Patent number 6,355,581
- Issue date Mar 12, 2002
- Chartered Semiconductor Manufacturing Ltd.
- Vladislav Vassiliev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of silicon oxide and silicon glass films deposition
- Patent number 6,197,705
- Issue date Mar 6, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Vladislav Vassiliev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of filling shallow trenches
- Patent number 6,180,490
- Issue date Jan 30, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Vladislav Vassiliev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to form shallow trench isolation structures with improved is...
- Patent number 6,027,982
- Issue date Feb 22, 2000
- Chartered Semiconductor Manufacturing Ltd.
- Igor V. Peidous
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fluorinated silicon oxide film deposition
- Patent number 5,876,798
- Issue date Mar 2, 1999
- Chartered Semiconductor Manufacturing, Ltd.
- Vladislav Y. Vassiliev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Vladislav Y. Vassiliev

Person

Patents Grantslast 30 patents

Method of silicon oxide and silicon glass films deposition

Method of high-density plasma boron-containing silicate glass film...

Gas-phase additives for an enhancement of lateral etch component du...

Method of silicon oxide and silicon glass films deposition

Method of filling shallow trenches

Method to form shallow trench isolation structures with improved is...

Method of fluorinated silicon oxide film deposition