Vladislav Yakovlev

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Milwaukee, WI, US

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Patents Grantslast 30 patents

Information Patent Grant
System and apparatus for evaluating the effectiveness of wafer dryi...
- Patent number 6,611,326
- Issue date Aug 26, 2003
- Lam Research Corporation
- Vladislav Yakovlev
- G01 - MEASURING TESTING
Information Patent Grant
Methods for evaluating advanced wafer drying techniques
- Patent number 6,521,050
- Issue date Feb 18, 2003
- Lam Research Corporation
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Non-contact discrete removal of substrate surface contaminants/coat...
- Publication number 20060131268
- Publication date Jun 22, 2006
- Lam Research Corp.
- Katrina Mikhaylichenko
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR