Vlasta Brusic Kaufman

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Geneva, IL, US

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Patents Grantslast 30 patents

Information Patent Grant
Rare earth salt/oxidizer-based CMP method
- Patent number 6,589,100
- Issue date Jul 8, 2003
- Cabot Microelectronics Corporation
- Kevin Moeggenborg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing slurry useful for copper/tantalum sub...
- Patent number 6,447,371
- Issue date Sep 10, 2002
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of polishing a multi-layer substrate
- Publication number 20030170991
- Publication date Sep 11, 2003
- Cabot Microelectronics Corporation
- Shumin Wang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
RARE EARTH SALT/OXIDIZER-BASED CMP METHOD
- Publication number 20030060135
- Publication date Mar 27, 2003
- Cabot Microelectronics Corporation
- Kevin Moeggenborg
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...