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METAL-PASSIVATING CMP COMPOSITIONS AND METHODS
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Publication number 20110100956
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Publication date May 5, 2011
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Cabot Microelectronics Corporation
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Jason KELEHER
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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CMP method for gold-containing substrates
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Publication number 20080156774
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Publication date Jul 3, 2008
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Cabot Microelectronics Corporation
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Vlasta Brusic
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CMP of copper/ruthenium/tantalum substrates
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Publication number 20080105652
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Publication date May 8, 2008
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Cabot Microelectronics Corporation
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Vlasta Brusic
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Gold CMP composition and method
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Publication number 20070278184
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Publication date Dec 6, 2007
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Vlasta Brusic
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CMP of copper/ruthenium substrates
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Publication number 20070090094
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Publication date Apr 26, 2007
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Cabot Microelectronics Corporation
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Christopher Thompson
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Controlled electrochemical polishing method
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Publication number 20060281196
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Publication date Dec 14, 2006
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Cabot Microelectronics Corporation
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Paul M. Feeney
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Polishing composition for noble metals
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Publication number 20060024967
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Publication date Feb 2, 2006
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Cabot Microelectronics Corporation
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Francesco De Rege Thesauro
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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ECMP system
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Publication number 20050167266
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Publication date Aug 4, 2005
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Cabot Microelectronics Corporation
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Vlasta Brusic
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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CMP of noble metals
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Publication number 20040266196
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Publication date Dec 30, 2004
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Cabot Microelectronics Corporation
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Francesco De Rege Thesauro
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CMP method for noble metals
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Publication number 20030181142
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Publication date Sep 25, 2003
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Cabot Microelectronics Corporation
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Francesco De Rege Thesauro
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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