Vlasta Brusic

Person

  • Geneva, IL, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCENE STRU...

    • Publication number 20130224955
    • Publication date Aug 29, 2013
    • Cabot Microelectronics Corporation
    • Vlasta Brusic
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METAL-PASSIVATING CMP COMPOSITIONS AND METHODS

    • Publication number 20110100956
    • Publication date May 5, 2011
    • Cabot Microelectronics Corporation
    • Jason KELEHER
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    COMPOSITIONS FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCEN...

    • Publication number 20090236559
    • Publication date Sep 24, 2009
    • Cabot Microelectronics Corporation
    • Vlasta Brusic
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHEMICAL-MECHANICAL POLISHING COMPOSITION AND METHOD FOR USING THE...

    • Publication number 20090152240
    • Publication date Jun 18, 2009
    • Cabot Microelectronics Corporation
    • Francesco de Rege Thesauro
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    POLISHING SLURRY FOR ALUMINUM AND ALUMINUM ALLOYS

    • Publication number 20080200098
    • Publication date Aug 21, 2008
    • Cabot Microelectronics Corporation
    • Kevin Moeggenborg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CMP method for gold-containing substrates

    • Publication number 20080156774
    • Publication date Jul 3, 2008
    • Cabot Microelectronics Corporation
    • Vlasta Brusic
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Compositions for polishing aluminum/copper and titanium in damascen...

    • Publication number 20080134585
    • Publication date Jun 12, 2008
    • Cabot Microelectronics Corporation
    • Vlasta Brusic
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    CMP of copper/ruthenium/tantalum substrates

    • Publication number 20080105652
    • Publication date May 8, 2008
    • Cabot Microelectronics Corporation
    • Vlasta Brusic
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    Gold CMP composition and method

    • Publication number 20070278184
    • Publication date Dec 6, 2007
    • Vlasta Brusic
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CMP of copper/ruthenium substrates

    • Publication number 20070090094
    • Publication date Apr 26, 2007
    • Cabot Microelectronics Corporation
    • Christopher Thompson
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Use of CMP for aluminum mirror and solar cell fabrication

    • Publication number 20070010098
    • Publication date Jan 11, 2007
    • Cabot Microelectronics Corporation
    • Vlasta Brusic
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Controlled electrochemical polishing method

    • Publication number 20060281196
    • Publication date Dec 14, 2006
    • Cabot Microelectronics Corporation
    • Paul M. Feeney
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Polishing composition for noble metals

    • Publication number 20060024967
    • Publication date Feb 2, 2006
    • Cabot Microelectronics Corporation
    • Francesco De Rege Thesauro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Electrochemical-mechanical polishing composition and method for usi...

    • Publication number 20050263407
    • Publication date Dec 1, 2005
    • Cabot Microelectronics Corporation
    • Vlasta Brusic
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    Chemical-mechanical polishing composition and method for using the...

    • Publication number 20050211950
    • Publication date Sep 29, 2005
    • Cabot Microelectronics Corporation
    • Francesco de Rege Thesauro
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    ECMP system

    • Publication number 20050167266
    • Publication date Aug 4, 2005
    • Cabot Microelectronics Corporation
    • Vlasta Brusic
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    Chemical-mechanical polishing of metals in an oxidized form

    • Publication number 20050148290
    • Publication date Jul 7, 2005
    • Cabot Microelectronics Corporation
    • Francesco De Rege Thesauro
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CMP of noble metals

    • Publication number 20040266196
    • Publication date Dec 30, 2004
    • Cabot Microelectronics Corporation
    • Francesco De Rege Thesauro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Process for fabricating optical switches

    • Publication number 20030189025
    • Publication date Oct 9, 2003
    • Chris C. Yu
    • G02 - OPTICS
  • Information Patent Application

    CMP method for noble metals

    • Publication number 20030181142
    • Publication date Sep 25, 2003
    • Cabot Microelectronics Corporation
    • Francesco De Rege Thesauro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CMP systems and methods utilizing amine-containing polymers

    • Publication number 20030139116
    • Publication date Jul 24, 2003
    • Cabot Microelectronics Corporation
    • Kevin J. Moeggenborg
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...