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Volker Becker
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Marxzell, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for etching a layer on a silicon semiconductor substrate
Patent number
8,946,090
Issue date
Feb 3, 2015
Robert Bosch GmbH
Volker Becker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for etching a substrate using an inductively coup...
Patent number
7,811,941
Issue date
Oct 12, 2010
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching structures into an etching body using a plasma
Patent number
7,785,486
Issue date
Aug 31, 2010
Robert Bosch GmbH
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for etching a substrate by using an inductively c...
Patent number
7,094,706
Issue date
Aug 22, 2006
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing silicon using etching processes
Patent number
7,052,623
Issue date
May 30, 2006
Robert Bosch GmbH
Volker Becker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for determining the lateral undercut of a structu...
Patent number
6,911,348
Issue date
Jun 28, 2005
Robert Bosch GmbH
Volker Becker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for etching a substrate using an inductively coup...
Patent number
6,899,817
Issue date
May 31, 2005
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
DEVICE AND METHOD FOR THE HIGH-FREQUENCY ETCHING OF A SUBSTRATE USI...
Patent number
6,720,273
Issue date
Apr 13, 2004
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for etching a substrate by using an inductively c...
Patent number
6,709,546
Issue date
Mar 23, 2004
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing micromechanical surface structures by vapor...
Patent number
6,558,559
Issue date
May 6, 2003
Robert Bosch GmbH
Volker Becker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plasma etching installation
Patent number
6,531,031
Issue date
Mar 11, 2003
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for applying a protecting lacquer on a wafer
Patent number
6,340,644
Issue date
Jan 22, 2002
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for anisotropic etching of substrates
Patent number
6,214,161
Issue date
Apr 10, 2001
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for detecting the transition between different materials in...
Patent number
6,200,822
Issue date
Mar 13, 2001
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method for Creating Hydrophilic Surfaces or Surface Regions on a Su...
Publication number
20220388839
Publication date
Dec 8, 2022
ROBERT BOSCH GmbH
Volker Becker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR ETCHING A LAYER ON A SILICON SEMICONDUCTOR SUBSTRATE
Publication number
20100203739
Publication date
Aug 12, 2010
Volker Becker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Device and method for etching a substrate by using an inductively c...
Publication number
20040149388
Publication date
Aug 5, 2004
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching structures into an etching body using a plasma
Publication number
20040124177
Publication date
Jul 1, 2004
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Device and method for etching a substrate by using an inductively c...
Publication number
20020046987
Publication date
Apr 25, 2002
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS