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Volker Boegli
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Berkeley, CA, US
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last 30 patents
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Patent Grant
Method and apparatus that determines charged particle beam shape codes
Patent number
6,556,702
Issue date
Apr 29, 2003
Applied Materials, Inc.
Stephen A. Rishton
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus and method for controlling a beam shape
Patent number
6,259,106
Issue date
Jul 10, 2001
Etec Systems, Inc.
Volker Boegli
B82 - NANO-TECHNOLOGY