Volker Graeschus

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure method and projection exposure apparatus for mi...
- Patent number 9,665,006
- Issue date May 30, 2017
- Carl Zeiss SMT GmbH
- Volker Graeschus
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure system and projection exposure method
- Patent number 9,146,475
- Issue date Sep 29, 2015
- Carl Zeiss SMT GmbH
- Paul Gräupner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for correcting a lithography projection objective, and such...
- Patent number 8,659,744
- Issue date Feb 25, 2014
- Carl Zeiss SMT GmbH
- Wilhelm Ulrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for correcting a lithography projection objective, and such...
- Patent number 8,174,676
- Issue date May 8, 2012
- Carl Zeiss SMT GmbH
- Wilhelm Ulrich
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
- Publication number 20150029479
- Publication date Jan 29, 2015
- Carl Zeiss SMT GMBH
- Volker Graeschus
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection Exposure System and Projection Exposure Method
- Publication number 20130182234
- Publication date Jul 18, 2013
- Carl Zeiss SMT GMBH
- Paul Graupner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CORRECTING A LITHOGRAPHY PROJECTION OBJECTIVE, AND SUCH...
- Publication number 20120188636
- Publication date Jul 26, 2012
- Carl Zeiss SMT GMBH
- Wilhelm Ulrich
- G02 - OPTICS
Information Patent Application
METHOD FOR CORRECTING A LITHOGRAPHY PROJECTION OBJECTIVE, AND SUCH...
- Publication number 20110279803
- Publication date Nov 17, 2011
- Carl Zeiss SMT GMBH
- Wilhelm Ulrich
- G02 - OPTICS
Information Patent Application
Method for correcting a lithography projection objective, and such...
- Publication number 20070019305
- Publication date Jan 25, 2007
- Wilhelm Ulrich
- G02 - OPTICS