Volker Mattern

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Boeblingen, DE

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Patents Grantslast 30 patents

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Apparatus for plasma or reactive ion etching and method of etching...
- Patent number 5,304,278
- Issue date Apr 19, 1994
- International Business Machines Corporation
- Johann Bartha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching substrates having a low thermal conductivity
- Patent number 5,296,091
- Issue date Mar 22, 1994
- International Business Machines Corporation
- Johann Bartha
- H01 - BASIC ELECTRIC ELEMENTS