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Volker SCHMITZ
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Pfullingen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for bonding wafers eutectically, and a wafer composite
Patent number
10,927,004
Issue date
Feb 23, 2021
Robert Bosch GmbH
Axel Grosse
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a micromechanical component
Patent number
10,336,610
Issue date
Jul 2, 2019
Robert Bosch GmbH
Heiko Stahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-mechanical component
Patent number
10,059,583
Issue date
Aug 28, 2018
Robert Bosch GmbH
Achim Breitling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method for producing a micromechanica...
Patent number
9,114,975
Issue date
Aug 25, 2015
Robert Bosch GmbH
Volker Schmitz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method for producing a micromechanica...
Patent number
8,809,095
Issue date
Aug 19, 2014
Robert Bosch GmbH
Volker Schmitz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for sealing an opening
Patent number
8,304,845
Issue date
Nov 6, 2012
Robert Bosch GmbH
Udo Bischof
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component having a cap having a closure
Patent number
8,154,094
Issue date
Apr 10, 2012
Robert Bosch GmbH
Volker Schmitz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...
Publication number
20240262682
Publication date
Aug 8, 2024
ROBERT BOSCH GmbH
Raphael Schuler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR BONDING WAFERS EUTECTICALLY, AND A WAFER COMPOSITE
Publication number
20190135617
Publication date
May 9, 2019
ROBERT BOSCH GmbH
Axel GROSSE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
Publication number
20180111828
Publication date
Apr 26, 2018
ROBERT BOSCH GmbH
Heiko Stahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-MECHANICAL COMPONENT
Publication number
20180044171
Publication date
Feb 15, 2018
ROBERT BOSCH GmbH
Achim Breitling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANCAL...
Publication number
20140327154
Publication date
Nov 6, 2014
ROBERT BOSCH GmbH
Volker SCHMITZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANCAL...
Publication number
20110006444
Publication date
Jan 13, 2011
Volker Schmitz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Sealing an Opening
Publication number
20090174148
Publication date
Jul 9, 2009
Udo Bischof
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT HAVING A CAP HAVING A CLOSURE
Publication number
20090090531
Publication date
Apr 9, 2009
Volker Schmitz
B81 - MICRO-STRUCTURAL TECHNOLOGY