Volker Tegeder

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Weissig, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for monitoring intentional or unavoidable layer depositio...
- Patent number 6,784,445
- Issue date Aug 31, 2004
- raunhofer-Gesellschaft zur Foederung der Angewandten Forschung E.V.
- Jürgen Ziegler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-supporting adaptable metrology device
- Patent number 6,745,637
- Issue date Jun 8, 2004
- Infineon Technologies SC300 GmbH & Co. KG
- Volker Tegeder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveying element and conveyor means for conveying wafer receptacle...
- Patent number 6,732,855
- Issue date May 11, 2004
- Motorola, Inc.
- Michael Lering
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
Self-supporting adaptable metrology device
- Publication number 20020152808
- Publication date Oct 24, 2002
- Volker Tegeder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for monitoring intentional or unavoidable layer depositio...
- Publication number 20020089677
- Publication date Jul 11, 2002
- Jurgen Ziegler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...