Membership
Tour
Register
Log in
Vu Bui
Follow
Person
West Nyack, NY, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method for depositing a low-resistivity titanium-oxynitride (TiON)...
Patent number
6,107,195
Issue date
Aug 22, 2000
Tokyo Electron Limited
Bruce David Gittleman
H01 - BASIC ELECTRIC ELEMENTS