Vuong P. Nguyen

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Allen, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Thermal process station with heated lid
- Patent number 6,884,066
- Issue date Apr 26, 2005
- FSI International, Inc.
- Vuong P. Nguyen
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Thermal processing system and methods for forming low-k dielectric...
- Patent number 6,838,115
- Issue date Jan 4, 2005
- FSI International, Inc.
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing chamber for heating and cooling wafer-like objects
- Patent number 6,423,947
- Issue date Jul 23, 2002
- FSI International, Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing chamber for heating and cooling wafer-like objects
- Patent number 6,307,184
- Issue date Oct 23, 2001
- FSI International, Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Thermal processing system and methods for forming low-k dielectric...
- Publication number 20040047993
- Publication date Mar 11, 2004
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal process station with heated lid
- Publication number 20040048220
- Publication date Mar 11, 2004
- Vuong P. Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing system and methods for forming low-k dielectric...
- Publication number 20020132052
- Publication date Sep 19, 2002
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing chamber for heating and cooling wafer-like objects
- Publication number 20010040155
- Publication date Nov 15, 2001
- FSI International Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS