Wade A. Krull

Person

Marblehead, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and method of making same
- Patent number 10,497,598
- Issue date Dec 3, 2019
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for the manufacture of semiconductor devices by t...
- Patent number 8,530,343
- Issue date Sep 10, 2013
- Semequip, Inc.
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for extracting ions from an ion source for use...
- Patent number 8,368,309
- Issue date Feb 5, 2013
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method of fabricating a semiconductor device
- Patent number 8,236,675
- Issue date Aug 7, 2012
- SemEquip, Inc.
- Wade A Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for the manufacture of semiconductor devices by t...
- Patent number 8,097,529
- Issue date Jan 17, 2012
- Semequip, Inc.
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing CMOS devices by the implantation of N- and...
- Patent number 7,994,031
- Issue date Aug 9, 2011
- Semequip, Inc.
- Thomas Neil Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster ion implantation for defect engineering
- Patent number 7,919,402
- Issue date Apr 5, 2011
- Semequip, Inc.
- Dale C. Jacobson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for extending equipment uptime in ion implanta...
- Patent number 7,820,981
- Issue date Oct 26, 2010
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for extracting ions from an ion source for use...
- Patent number 7,791,047
- Issue date Sep 7, 2010
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method of fabricating a semiconductor device
- Patent number 7,723,233
- Issue date May 25, 2010
- SemEquip, Inc.
- Wade A Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for the manufacture of semiconductor devices by t...
- Patent number 7,666,771
- Issue date Feb 23, 2010
- Semequip, Inc.
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for extending equipment uptime in ion implanta...
- Patent number 7,629,590
- Issue date Dec 8, 2009
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation system and control method
- Patent number 7,609,003
- Issue date Oct 27, 2009
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation system and control method
- Patent number 7,528,550
- Issue date May 5, 2009
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation system and control method
- Patent number 7,394,202
- Issue date Jul 1, 2008
- Semequip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation system and control method
- Patent number 7,064,491
- Issue date Jun 20, 2006
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion dosage measurement apparatus for an ion beam implanter and method
- Patent number 5,998,798
- Issue date Dec 7, 1999
- Eaton Corporation
- Alfred Mike Halling
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic Chuck and Method of Making Same
- Publication number 20160336210
- Publication date Nov 17, 2016
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY T...
- Publication number 20110306193
- Publication date Dec 15, 2011
- SemEquip, Inc.
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for extracting ions from an ion source for use...
- Publication number 20100107980
- Publication date May 6, 2010
- SemEquip
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
- Publication number 20100022077
- Publication date Jan 28, 2010
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY T...
- Publication number 20090286367
- Publication date Nov 19, 2009
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER ION IMPLANTATION FOR DEFECT ENGINEERING
- Publication number 20080299749
- Publication date Dec 4, 2008
- Dale C. Jacobson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of fabricating a semiconductor device
- Publication number 20080200020
- Publication date Aug 21, 2008
- SemEquip, Inc.
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for extending equipment uptime in ion implanta...
- Publication number 20080121811
- Publication date May 29, 2008
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for extending equipment uptime in ion implanta...
- Publication number 20070241689
- Publication date Oct 18, 2007
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion implantation system and control method
- Publication number 20070176114
- Publication date Aug 2, 2007
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation system and control method
- Publication number 20070176115
- Publication date Aug 2, 2007
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for the manufacture of semiconductor devices by t...
- Publication number 20070148888
- Publication date Jun 28, 2007
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for extracting ions from an ion source for use...
- Publication number 20070108395
- Publication date May 17, 2007
- SemEquip
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing CMOS devices by the implantation of N- and...
- Publication number 20070105325
- Publication date May 10, 2007
- SemEquip, Inc.
- Thomas Neil Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for extracting ions from an ion source for use...
- Publication number 20060272775
- Publication date Dec 7, 2006
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for extracting ions from an ion source for use...
- Publication number 20060272776
- Publication date Dec 7, 2006
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion implantation system and control method
- Publication number 20060238133
- Publication date Oct 26, 2006
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation system and control method
- Publication number 20040104682
- Publication date Jun 3, 2004
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing CMOS devices by the implantation of N- and...
- Publication number 20040002202
- Publication date Jan 1, 2004
- Thomas Neil Horsky
- H01 - BASIC ELECTRIC ELEMENTS

Wade A. Krull

Person

Patents Grantslast 30 patents

Electrostatic chuck and method of making same

System and method for the manufacture of semiconductor devices by t...

Method and apparatus for extracting ions from an ion source for use...

Semiconductor device and method of fabricating a semiconductor device

System and method for the manufacture of semiconductor devices by t...

Method of manufacturing CMOS devices by the implantation of N- and...

Cluster ion implantation for defect engineering

Method and apparatus for extending equipment uptime in ion implanta...

Method and apparatus for extracting ions from an ion source for use...

Semiconductor device and method of fabricating a semiconductor device

System and method for the manufacture of semiconductor devices by t...

Method and apparatus for extending equipment uptime in ion implanta...

Ion implantation system and control method

Ion implantation system and control method

Ion implantation system and control method

Ion implantation system and control method

Ion dosage measurement apparatus for an ion beam implanter and method

Patents Applicationslast 30 patents

Electrostatic Chuck and Method of Making Same

SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY T...

Method and apparatus for extracting ions from an ion source for use...

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE

SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY T...

CLUSTER ION IMPLANTATION FOR DEFECT ENGINEERING

Semiconductor device and method of fabricating a semiconductor device

Method and apparatus for extending equipment uptime in ion implanta...

Method and apparatus for extending equipment uptime in ion implanta...

Ion implantation system and control method

Ion implantation system and control method

System and method for the manufacture of semiconductor devices by t...

Method and apparatus for extracting ions from an ion source for use...

Method of manufacturing CMOS devices by the implantation of N- and...

Method and apparatus for extracting ions from an ion source for use...

Method and apparatus for extracting ions from an ion source for use...

Ion implantation system and control method

Ion implantation system and control method

Method of manufacturing CMOS devices by the implantation of N- and...