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Wade Van Buren
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Boise, ID, US
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last 30 patents
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Patent Grant
Apparatus for loading and unloading substrates to a chemical-mechan...
Patent number
6,054,015
Issue date
Apr 25, 2000
Micron Technology, Inc.
Thad Brunelli
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method for loading and unloading substrates to a chem...
Patent number
5,702,292
Issue date
Dec 30, 1997
Micron Technology, Inc.
Thad Brunelli
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR