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Wade Zawalski
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for providing pulsed plasma during a portion of a semiconduc...
Patent number
6,566,272
Issue date
May 20, 2003
Applied Materials Inc.
Alex Paterson
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma energy control by inducing plasma instability
Patent number
6,558,564
Issue date
May 6, 2003
Applied Materials Inc.
Peter K. Loewenhardt
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma assisted processing chamber with separate control of species...
Patent number
6,352,049
Issue date
Mar 5, 2002
Applied Materials, Inc.
Gerald Yin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR PROVIDING PULSED PLASMA DURING A PORTION OF A SEMICONDUC...
Publication number
20020052111
Publication date
May 2, 2002
ALEX PATERSON
H01 - BASIC ELECTRIC ELEMENTS