Wagner Chang

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Huwei Township, TW

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Patents Grantslast 30 patents

Information Patent Grant
Single wafer cleaning tool with H2SO4 recycling
- Patent number 10,510,527
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Wen Hsiao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Single Wafer Cleaning Tool with H2SO4 Recycling
- Publication number 20140216500
- Publication date Aug 7, 2014
- Taiwan Semicunductor Manufacturing Co., Ltd.
- Chien-Wen Hsiao
- H01 - BASIC ELECTRIC ELEMENTS