Waiching Chow

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multiple stage process for cleaning process chambers
- Patent number 6,872,322
- Issue date Mar 29, 2005
- Applied Materials, Inc.
- Waiching Chow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment of etching chambers using activated cleaning gas
- Patent number 6,379,575
- Issue date Apr 30, 2002
- Applied Materials, Inc.
- Gerald Zheyao Yin
- B08 - CLEANING