Waikit Fung

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Biased H2 etch process in deposition-etch-deposition gap fill
- Patent number 7,163,896
- Issue date Jan 16, 2007
- Novellus Systems, Inc.
- Wenxian Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling etch process repeatability
- Patent number 7,078,312
- Issue date Jul 18, 2006
- Novellus Systems, Inc.
- Siswanto Sutanto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phosphorous-doped silicon dioxide process to customize contact etch...
- Patent number 7,064,087
- Issue date Jun 20, 2006
- Novellus Systems, Inc.
- Michael Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...