Waiman Ng

Follow

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods of stabilizing measurement of ArF resist in CD-SEM
- Patent number 7,015,468
- Issue date Mar 21, 2006
- KLA-Tencor Technologies Corporation
- Amir Azordegan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron beam microscope
- Patent number 6,570,154
- Issue date May 27, 2003
- KLA-Tencor Technologies Corporation
- Douglas K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron beam microscope
- Patent number 6,066,849
- Issue date May 23, 2000
- KLA Tencor
- Douglas K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS