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Wakako Ishida
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Kurokawa-gun, Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Etching method and plasma processing apparatus
Patent number
11,430,664
Issue date
Aug 30, 2022
Tokyo Electron Limited
Wakako Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and substrate processing apparatus
Patent number
11,328,934
Issue date
May 10, 2022
Tokyo Electron Limited
Sho Oikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
10,658,189
Issue date
May 19, 2020
Tokyo Electron Limited
Yoshinari Hatazaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240212982
Publication date
Jun 27, 2024
TOKYO ELECTRON LIMITED
Taihei MATSUHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220384183
Publication date
Dec 1, 2022
TOKYO ELECTRON LIMITED
Wakako ISHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20210233776
Publication date
Jul 29, 2021
TOKYO ELECTRON LIMITED
Wakako Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200411326
Publication date
Dec 31, 2020
TOKYO ELECTRON LIMITED
Sho OIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20190080917
Publication date
Mar 14, 2019
TOKYO ELECTRON LIMITED
Yoshinari Hatazaki
H01 - BASIC ELECTRIC ELEMENTS