Wakako Naito

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method and computer readable storage medium
- Patent number 7,943,523
- Issue date May 17, 2011
- Tokyo Electron Limited
- Shin Hirotsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and plasma processing method
- Patent number 7,211,197
- Issue date May 1, 2007
- Tokyo Electron Limited
- Masaaki Hagihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching and method of plasma treatment
- Patent number 6,780,342
- Issue date Aug 24, 2004
- Tokyo Electron Limited
- Masaaki Hagihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD AND COMPUTER READABLE STORAGE MEDIUM
- Publication number 20080045031
- Publication date Feb 21, 2008
- TOKYO ELECTRON LIMITED
- Shin HIROTSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching method and apparatus, control program and computer-r...
- Publication number 20060292876
- Publication date Dec 28, 2006
- TOKYO ELECTRON LIMITED
- Wakako Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method
- Publication number 20050269294
- Publication date Dec 8, 2005
- TOKYO ELECTRON LIMITED
- Yoshiki Igarashi
- B08 - CLEANING
Information Patent Application
Etching method and plasma processing method
- Publication number 20050000939
- Publication date Jan 6, 2005
- TOKYO ELECTRON LIMITED
- Masaaki Hagihara
- H01 - BASIC ELECTRIC ELEMENTS