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Hamura-shi, JP
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last 30 patents
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Patent Grant
Inspecting method and apparatus for repeated micro-miniature patterns
Patent number
6,944,325
Issue date
Sep 13, 2005
Hitachi High-Tech Electronics Engineering Co., Ltd.
Junichi Taguchi
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Inspecting method and apparatus for repeated micro-miniature patterns
Patent number
6,661,912
Issue date
Dec 9, 2003
Hitachi Electronics Engineering Co., Ltd.
Junichi Taguchi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
Inspecting method and apparatus for repeated micro-miniature patterns
Publication number
20040047500
Publication date
Mar 11, 2004
Junichi Taguchi
G06 - COMPUTING CALCULATING COUNTING