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Walter Crosby
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Los Alamitos, CA, US
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last 30 patents
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Patent Grant
Immersion lithography laser light source with pulse stretcher
Patent number
7,643,528
Issue date
Jan 5, 2010
Cymer, Inc.
William N. Partlo
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Immersion lithography laser light source with pulse stretcher
Publication number
20100074295
Publication date
Mar 25, 2010
Cymer, Inc.
William N. Partlo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion lithography laser light source with pulse stretcher
Publication number
20090080476
Publication date
Mar 26, 2009
Cymer, Inc.
William N. Partlo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY