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Enhanced plasma etching
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Patent number 5,110,409
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Issue date May 5, 1992
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IBM
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Frank D. Egitto
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H01 - BASIC ELECTRIC ELEMENTS
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Enhanced plasma etching
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Patent number 4,985,112
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Issue date Jan 15, 1991
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International Business Machines Corporation
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Frank D. Egitto
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H01 - BASIC ELECTRIC ELEMENTS
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Process for removing contaminant
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Patent number 4,853,081
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Issue date Aug 1, 1989
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IBM Corporation
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Walter E. Mlynko
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Process for removing contaminant
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Patent number 4,654,115
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Issue date Mar 31, 1987
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International Business Machines Corporation
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Frank D. Egitto
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR