Walter L. Smith

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Evolution of library data sets
- Patent number 8,543,557
- Issue date Sep 24, 2013
- KLA-Tencor Corporation
- David M. Aikens
- G01 - MEASURING TESTING
Information Patent Grant
Modulated scatterometry
- Patent number 7,400,402
- Issue date Jul 15, 2008
- KLA-Tencor Corp.
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Grant
Modulated scatterometry
- Patent number 7,239,390
- Issue date Jul 3, 2007
- Therma-Wave, Inc.
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Grant
Combination optical and electrical metrology apparatus
- Patent number 6,982,567
- Issue date Jan 3, 2006
- Therma-Wave, Inc.
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry for junction metrology
- Patent number 6,950,190
- Issue date Sep 27, 2005
- Therma-Wave, Inc.
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Grant
Evolution of library data sets
- Patent number 6,898,596
- Issue date May 24, 2005
- Therma-Wave, Inc.
- David M. Aikens
- G01 - MEASURING TESTING
Information Patent Grant
Modulated scatterometry
- Patent number 6,888,632
- Issue date May 3, 2005
- Therma-Wave, Inc.
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for improved metrology using combined optical a...
- Patent number 6,791,310
- Issue date Sep 14, 2004
- Therma-Wave, Inc.
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for evaluating thermal and electrical characteristics in...
- Patent number 5,228,776
- Issue date Jul 20, 1993
- Therma-Wave, Inc.
- Walter L. Smith
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for evaluating surface and subsurface and subs...
- Patent number 5,042,952
- Issue date Aug 27, 1991
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for evaluating surface and subsurface features...
- Patent number 4,952,063
- Issue date Aug 28, 1990
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for evaluating surface and subsurface features...
- Patent number 4,854,710
- Issue date Aug 8, 1989
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for optically detecting surface states in mate...
- Patent number 4,750,822
- Issue date Jun 14, 1988
- Therma-Wave, Inc.
- Allan Rosencwaig
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for evaluating surface conditions of a sample
- Patent number 4,636,088
- Issue date Jan 13, 1987
- Therma-Wave, Inc.
- Allan Rosencwaig
- G01 - MEASURING TESTING
Information Patent Grant
Detecting thermal waves to evaluate thermal parameters
- Patent number 4,579,463
- Issue date Apr 1, 1986
- Therma-Wave Partners
- Allan Rosencwaig
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Modulated scatterometry
- Publication number 20070188762
- Publication date Aug 16, 2007
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Application
Evolution of library data sets
- Publication number 20050182592
- Publication date Aug 18, 2005
- David M. Aikens
- G01 - MEASURING TESTING
Information Patent Application
Modulated scatterometry
- Publication number 20050168759
- Publication date Aug 4, 2005
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Application
Combination optical and electrical metrology apparatus
- Publication number 20040207427
- Publication date Oct 21, 2004
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Application
Modulated scatterometry
- Publication number 20040169859
- Publication date Sep 2, 2004
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Application
Scatterometry for junction metrology
- Publication number 20040136003
- Publication date Jul 15, 2004
- Walter Lee Smith
- G01 - MEASURING TESTING
Information Patent Application
Evolution of library data sets
- Publication number 20030076511
- Publication date Apr 24, 2003
- David M. Aikens
- G01 - MEASURING TESTING
Information Patent Application
Combination optical and electrical metrology apparatus
- Publication number 20020186036
- Publication date Dec 12, 2002
- Walter Lee Smith
- G01 - MEASURING TESTING

Walter L. Smith

Person

Patents Grantslast 30 patents

Evolution of library data sets

Modulated scatterometry

Modulated scatterometry

Combination optical and electrical metrology apparatus

Scatterometry for junction metrology

Evolution of library data sets

Modulated scatterometry

Systems and methods for improved metrology using combined optical a...

Apparatus for evaluating thermal and electrical characteristics in...

Method and apparatus for evaluating surface and subsurface and subs...

Method and apparatus for evaluating surface and subsurface features...

Method and apparatus for evaluating surface and subsurface features...

Method and apparatus for optically detecting surface states in mate...

Method and apparatus for evaluating surface conditions of a sample

Detecting thermal waves to evaluate thermal parameters

Patents Applicationslast 30 patents

Modulated scatterometry

Evolution of library data sets

Modulated scatterometry

Combination optical and electrical metrology apparatus

Modulated scatterometry

Scatterometry for junction metrology

Evolution of library data sets

Combination optical and electrical metrology apparatus