Walter Schoenleber

Person

Holzgerlingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Endpoint detection with multiple light beams
- Patent number 7,086,929
- Issue date Aug 8, 2006
- Applied Materials
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING
Information Patent Grant
Method for monitoring a substrate during chemical mechanical polishing
- Patent number 7,018,271
- Issue date Mar 28, 2006
- Applied Materials Inc.
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for determining polishing endpoint with multip...
- Patent number 6,986,699
- Issue date Jan 17, 2006
- Applied Materials, Inc.
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for measuring substrate layer thickness during...
- Patent number 6,764,380
- Issue date Jul 20, 2004
- Applied Materials Inc.
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for measuring substrate layer thickness during...
- Patent number 6,524,165
- Issue date Feb 25, 2003
- Applied Materials, Inc.
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for determining substrate layer thickness duri...
- Patent number 6,247,998
- Issue date Jun 19, 2001
- Applied Materials, Inc.
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for measuring substrate layer thickness during...
- Patent number 6,159,073
- Issue date Dec 12, 2000
- Applied Materials, Inc.
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Method for monitoring a substrate during chemical mechanical polishing
- Publication number 20040242123
- Publication date Dec 2, 2004
- APPLIED MATERIALS, INC.
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING
Information Patent Application
Endpoint detection with multiple light beams
- Publication number 20040058621
- Publication date Mar 25, 2004
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for measuring substrate layer thickness during...
- Publication number 20030104761
- Publication date Jun 5, 2003
- Applied Materials, Inc., a Delaware corporation
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for determining polishing endpoint with multip...
- Publication number 20010027080
- Publication date Oct 4, 2001
- Applied Materials, Inc., Delaware corporation
- Andreas Norbert Wiswesser
- B24 - GRINDING POLISHING

Walter Schoenleber

Person

Patents Grantslast 30 patents

Endpoint detection with multiple light beams

Method for monitoring a substrate during chemical mechanical polishing

Method and apparatus for determining polishing endpoint with multip...

Method and apparatus for measuring substrate layer thickness during...

Method and apparatus for measuring substrate layer thickness during...

Method and apparatus for determining substrate layer thickness duri...

Method and apparatus for measuring substrate layer thickness during...

Patents Applicationslast 30 patents

Method for monitoring a substrate during chemical mechanical polishing

Endpoint detection with multiple light beams

Method and apparatus for measuring substrate layer thickness during...

Method and apparatus for determining polishing endpoint with multip...