Walter Swanson

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Kikuyomachi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for washing substrate
- Patent number 6,379,469
- Issue date Apr 30, 2002
- Tokyo Electron Limited
- Hideya Tanaka
- B08 - CLEANING
Information Patent Grant
Apparatus and method for washing substrate
- Patent number 6,158,075
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Hideya Tanaka
- B08 - CLEANING