Walter Zygmunt

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
HDP-CVD SiON films for gap-fill
- Patent number 7,704,897
- Issue date Apr 27, 2010
- Applied Materials, Inc.
- Hemant P. Mungekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HDP-CVD deposition process for filling high aspect ratio gaps
- Patent number 7,196,021
- Issue date Mar 27, 2007
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
- Patent number 6,929,700
- Issue date Aug 16, 2005
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HDP-CVD deposition process for filling high aspect ratio gaps
- Patent number 6,914,016
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HDP-CVD deposition process for filling high aspect ratio gaps
- Patent number 6,740,601
- Issue date May 25, 2004
- Applied Materials Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
- Patent number 6,596,653
- Issue date Jul 22, 2003
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for modifying the profile of narrow, high-aspe...
- Patent number 6,579,811
- Issue date Jun 17, 2003
- Applied Materials Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for modifying the profile of narrow, high-aspe...
- Patent number 6,200,911
- Issue date Mar 13, 2001
- Applied Materials, Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HDP-CVD SION FILMS FOR GAP-FILL
- Publication number 20090215281
- Publication date Aug 27, 2009
- Applied Materials, Inc.
- HEMANT P. MUNGEKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HDP-CVD deposition process for filling high aspect ratio gaps
- Publication number 20050181632
- Publication date Aug 18, 2005
- APPLIED MATERIALS, INC., A Delaware corporation
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HDP-CVD deposition process for filling high aspect ratio gaps
- Publication number 20040152341
- Publication date Aug 5, 2004
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
- Publication number 20030159656
- Publication date Aug 28, 2003
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for modifying the profile of narrow, high-aspe...
- Publication number 20030157812
- Publication date Aug 21, 2003
- Applied Materials, Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HDP-CVD deposition process for filling high aspect ratio gaps
- Publication number 20020187655
- Publication date Dec 12, 2002
- APPLIED MATERIALS, INC.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
- Publication number 20020187656
- Publication date Dec 12, 2002
- APPLIED MATERIALS, INC.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for modifying the profile of narrow, high-aspe...
- Publication number 20010001175
- Publication date May 17, 2001
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Walter Zygmunt

Person

Patents Grantslast 30 patents

HDP-CVD SiON films for gap-fill

HDP-CVD deposition process for filling high aspect ratio gaps

Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD

HDP-CVD deposition process for filling high aspect ratio gaps

HDP-CVD deposition process for filling high aspect ratio gaps

Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD

Method and apparatus for modifying the profile of narrow, high-aspe...

Method and apparatus for modifying the profile of narrow, high-aspe...

Patents Applicationslast 30 patents

HDP-CVD SION FILMS FOR GAP-FILL

HDP-CVD deposition process for filling high aspect ratio gaps

HDP-CVD deposition process for filling high aspect ratio gaps

Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD

Method and apparatus for modifying the profile of narrow, high-aspe...

HDP-CVD deposition process for filling high aspect ratio gaps

Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD

Method and apparatus for modifying the profile of narrow, high-aspe...