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Waltraud Dietl
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Illerkirchberg, DE
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last 30 patents
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Patent Grant
Apparatus for the heat treatment of disc shaped substrates
Patent number
9,111,970
Issue date
Aug 18, 2015
Waltraud Dietl
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR THE HEAT TREATMENT OF DISC SHAPED SUBSTRATES
Publication number
20090217875
Publication date
Sep 3, 2009
Mattson Thermal Products GmbH
Waltraud Dietl
H01 - BASIC ELECTRIC ELEMENTS