Wan-Ching Chang

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Hsinchu, TW

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Patents Applicationslast 30 patents

Information Patent Application
Teos deposition apparatus for semiconductor manufacture processes
- Publication number 20020088398
- Publication date Jul 11, 2002
- Mosel Vitelic Inc.
- Chin-Cheng Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...