Wanki Kim

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Gyeoggi, KR

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Patents Grantslast 30 patents

Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 10,361,076
- Issue date Jul 23, 2019
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 9,793,110
- Issue date Oct 17, 2017
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing silicon oxide
- Patent number 9,685,320
- Issue date Jun 20, 2017
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 9,257,274
- Issue date Feb 9, 2016
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
- Publication number 20170323786
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING SILICON OXIDE
- Publication number 20160163539
- Publication date Jun 9, 2016
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
- Publication number 20160118246
- Publication date Apr 28, 2016
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING SILICON OXIDE
- Publication number 20160020092
- Publication date Jan 21, 2016
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
- Publication number 20140106574
- Publication date Apr 17, 2014
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...