Wataru Kume

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Beaverton, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,660,182
- Issue date May 23, 2017
- Tokyo Electron Limited
- Takashi Sone
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150050750
- Publication date Feb 19, 2015
- TOKYO ELECTRON LIMITED
- Takashi Sone
- H01 - BASIC ELECTRIC ELEMENTS