Wataru NAGATOMO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern matching device and computer program for pattern matching
- Patent number 11,669,953
- Issue date Jun 6, 2023
- HITACHI HIGH-TECH CORPORATION
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern matching apparatus and computer program
- Patent number 10,535,129
- Issue date Jan 14, 2020
- Hitachi High-Technologies Corporation
- Masahiro Kitazawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection apparatus and method using pattern matching
- Patent number 10,255,519
- Issue date Apr 9, 2019
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Matching process device, matching process method, and inspection de...
- Patent number 9,619,727
- Issue date Apr 11, 2017
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Template matching processing device and template matching processin...
- Patent number 8,971,627
- Issue date Mar 3, 2015
- Hitachi High-Technologies Corporation
- Jun'ichi Taguchi
- G01 - MEASURING TESTING
Information Patent Grant
Pattern matching method and pattern matching apparatus
- Patent number 8,885,950
- Issue date Nov 11, 2014
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for monitoring cross-sectional shape of a patt...
- Patent number 8,881,067
- Issue date Nov 4, 2014
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for creating imaging recipe
- Patent number RE45224
- Issue date Oct 28, 2014
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- 716 - Computer-aided design and analysis of circuits and semiconductor masks
Information Patent Grant
Method and apparatus for creating imaging recipe
- Patent number RE45204
- Issue date Oct 21, 2014
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- 716 - Computer-aided design and analysis of circuits and semiconductor masks
Information Patent Grant
Scanning electron microscope and a method for imaging a specimen us...
- Patent number 8,853,630
- Issue date Oct 7, 2014
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope and a method for imaging a specimen us...
- Patent number 8,642,957
- Issue date Feb 4, 2014
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for monitoring cross-sectional shape of a patt...
- Patent number 8,356,260
- Issue date Jan 15, 2013
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and its system for calibrating measured data between differe...
- Patent number 8,214,166
- Issue date Jul 3, 2012
- Hitachi High-Technologies Corporation
- Maki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and a method for imaging a specimen us...
- Patent number 8,158,938
- Issue date Apr 17, 2012
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for semiconductor device production process mo...
- Patent number 7,816,062
- Issue date Oct 19, 2010
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for monitoring exposure process
- Patent number 7,685,560
- Issue date Mar 23, 2010
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring pattern dimensions
- Patent number 7,633,061
- Issue date Dec 15, 2009
- Hitachi High-Technologies Corporation
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for evaluating pattern shape of a semiconducto...
- Patent number 7,615,746
- Issue date Nov 10, 2009
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for creating imaging recipe
- Patent number 7,559,047
- Issue date Jul 7, 2009
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dimension measuring SEM system, method of evaluating shape of circu...
- Patent number 7,449,689
- Issue date Nov 11, 2008
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for arranging recipe of scanning electron micr...
- Patent number 7,365,322
- Issue date Apr 29, 2008
- Hitachi, Ltd.
- Atsushi Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of monitoring an exposure process
- Patent number 6,929,892
- Issue date Aug 16, 2005
- Hitachi High-Technologies Corporation
- Chie Shishido
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Pattern Matching Device, Pattern Measuring System, Pattern Matching...
- Publication number 20230298310
- Publication date Sep 21, 2023
- Hitachi High-Tech Corporation
- Liang LI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSOR SYSTEM, SEMICONDUCTOR INSPECTION SYSTEM, AND PROGRAM
- Publication number 20230230886
- Publication date Jul 20, 2023
- HITACHI HIGH-TECH CORPORATION
- Kenji YASUI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Matching Device, Pattern Measurement System, and Non-Transi...
- Publication number 20230071668
- Publication date Mar 9, 2023
- Hitachi High-Tech Corporation
- Liang LI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Matching Device and Computer Program for Pattern Matching
- Publication number 20180005363
- Publication date Jan 4, 2018
- Hitachi High-Technologies Corporation
- Wataru NAGATOMO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection Apparatus and Method Using Pattern Matching
- Publication number 20170109607
- Publication date Apr 20, 2017
- Hitachi High-Technologies Corporation
- Wataru NAGATOMO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Template Creation Device for Sample Observation Device, and Sample...
- Publication number 20160140287
- Publication date May 19, 2016
- Hitachi High-Technologies Corporation
- Yuki OJIMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Matching Process Device, Matching Process Method, and Inspection De...
- Publication number 20150199583
- Publication date Jul 16, 2015
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND A METHOD FOR IMAGING A SPECIMEN US...
- Publication number 20140145078
- Publication date May 29, 2014
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G01 - MEASURING TESTING
Information Patent Application
PATTERN MATCHING APPARATUS AND COMPUTER PROGRAM
- Publication number 20140023265
- Publication date Jan 23, 2014
- Masahiro Kitazawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MATCHING DEVICE AND COMPUTER PROGRAM
- Publication number 20140016854
- Publication date Jan 16, 2014
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR MONITORING CROSS-SECTIONAL SHAPE OF A PATT...
- Publication number 20130195346
- Publication date Aug 1, 2013
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TEMPLATE MATCHING PROCESSING DEVICE AND TEMPLATE MATCHING PROCESSIN...
- Publication number 20130114898
- Publication date May 9, 2013
- Hitachi High-Technologies Corporation
- Jun'ichi Taguchi
- G01 - MEASURING TESTING
Information Patent Application
Pattern Matching Method and Pattern Matching Apparatus
- Publication number 20120207397
- Publication date Aug 16, 2012
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning Electron Microscope and a Method for Imaging a Specimen Us...
- Publication number 20120181426
- Publication date Jul 19, 2012
- Atsushi MIYAMOTO
- G01 - MEASURING TESTING
Information Patent Application
PATTERN SHAPE SELECTION METHOD AND PATTERN MEASURING DEVICE
- Publication number 20120126116
- Publication date May 24, 2012
- Hitachi High-Technologies Corporation
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND METHOD OF MEASURING PATTERN DIMENS...
- Publication number 20090212215
- Publication date Aug 27, 2009
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G01 - MEASURING TESTING
Information Patent Application
Method and Its System for Calibrating Measured Data Between Differe...
- Publication number 20080319696
- Publication date Dec 25, 2008
- Maki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MEASURING PATTERN DIMENSIONS
- Publication number 20080197280
- Publication date Aug 21, 2008
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND A METHOD FOR IMAGING A SPECIMEN US...
- Publication number 20070210252
- Publication date Sep 13, 2007
- Atsushi MIYAMOTO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MONITORING CROSS-SECTIONAL SHAPE OF A PATT...
- Publication number 20070198955
- Publication date Aug 23, 2007
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for evaluating pattern shape of a semiconducto...
- Publication number 20070120056
- Publication date May 31, 2007
- Wataru Nagatomo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for semiconductor device production process mo...
- Publication number 20070105243
- Publication date May 10, 2007
- Wataru Nagatomo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for arranging recipe of scanning electron micr...
- Publication number 20060284081
- Publication date Dec 21, 2006
- Atsushi Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for measuring dimension of a pattern formed on...
- Publication number 20060288325
- Publication date Dec 21, 2006
- Atsushi Miyamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Dimension measuring SEM system, method of evaluating shape of circu...
- Publication number 20060108524
- Publication date May 25, 2006
- Wataru Nagatomo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for monitoring exposure process
- Publication number 20050221207
- Publication date Oct 6, 2005
- Wataru Nagatomo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of monitoring an exposure process
- Publication number 20050037271
- Publication date Feb 17, 2005
- Chie Shishido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of setting etching parameters and system therefor
- Publication number 20050016682
- Publication date Jan 27, 2005
- Wataru Nagatomo
- H01 - BASIC ELECTRIC ELEMENTS

Wataru NAGATOMO

Person

Patents Grantslast 30 patents

Pattern matching device and computer program for pattern matching

Pattern matching apparatus and computer program

Inspection apparatus and method using pattern matching

Matching process device, matching process method, and inspection de...

Template matching processing device and template matching processin...

Pattern matching method and pattern matching apparatus

Method and apparatus for monitoring cross-sectional shape of a patt...

Method and apparatus for creating imaging recipe

Method and apparatus for creating imaging recipe

Scanning electron microscope and a method for imaging a specimen us...

Scanning electron microscope and a method for imaging a specimen us...

Method and apparatus for monitoring cross-sectional shape of a patt...

Method and its system for calibrating measured data between differe...

Scanning electron microscope and a method for imaging a specimen us...

Method and apparatus for semiconductor device production process mo...

Method and apparatus for monitoring exposure process

Method and apparatus for measuring pattern dimensions

Method and apparatus for evaluating pattern shape of a semiconducto...

Method and apparatus for creating imaging recipe

Dimension measuring SEM system, method of evaluating shape of circu...

Method and apparatus for arranging recipe of scanning electron micr...

Method of monitoring an exposure process

Patents Applicationslast 30 patents

Pattern Matching Device, Pattern Measuring System, Pattern Matching...

PROCESSOR SYSTEM, SEMICONDUCTOR INSPECTION SYSTEM, AND PROGRAM

Pattern Matching Device, Pattern Measurement System, and Non-Transi...

Pattern Matching Device and Computer Program for Pattern Matching

Inspection Apparatus and Method Using Pattern Matching

Template Creation Device for Sample Observation Device, and Sample...

Matching Process Device, Matching Process Method, and Inspection De...

SCANNING ELECTRON MICROSCOPE AND A METHOD FOR IMAGING A SPECIMEN US...

PATTERN MATCHING APPARATUS AND COMPUTER PROGRAM

PATTERN MATCHING DEVICE AND COMPUTER PROGRAM

METHOD AND APPARATUS FOR MONITORING CROSS-SECTIONAL SHAPE OF A PATT...

TEMPLATE MATCHING PROCESSING DEVICE AND TEMPLATE MATCHING PROCESSIN...

Pattern Matching Method and Pattern Matching Apparatus

Scanning Electron Microscope and a Method for Imaging a Specimen Us...

PATTERN SHAPE SELECTION METHOD AND PATTERN MEASURING DEVICE

SCANNING ELECTRON MICROSCOPE AND METHOD OF MEASURING PATTERN DIMENS...

Method and Its System for Calibrating Measured Data Between Differe...

METHOD AND APPARATUS FOR MEASURING PATTERN DIMENSIONS

SCANNING ELECTRON MICROSCOPE AND A METHOD FOR IMAGING A SPECIMEN US...

METHOD AND APPARATUS FOR MONITORING CROSS-SECTIONAL SHAPE OF A PATT...

Method and apparatus for evaluating pattern shape of a semiconducto...

Method and apparatus for semiconductor device production process mo...

Method and apparatus for arranging recipe of scanning electron micr...

Method and apparatus for measuring dimension of a pattern formed on...

Dimension measuring SEM system, method of evaluating shape of circu...

Method and apparatus for monitoring exposure process

Method of monitoring an exposure process

Method of setting etching parameters and system therefor